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Magnetron filament control circuit

A technology for controlling circuits and magnetrons, which is applied in the direction of electric light sources, electrical components, and home appliance efficiency improvement, etc. It can solve the problems of fast change rate and difficulty in ensuring the temperature stability of the magnetron filament, and achieve stable power and guaranteed temperature. Effect

Active Publication Date: 2022-08-09
JIHUA LAB
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The impedance of the magnetron filament will change with the temperature change caused by the filament absorbed power, and the rate of change is relatively fast, so the existing control circuit is difficult to ensure the stability of the temperature of the magnetron filament

Method used

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  • Magnetron filament control circuit
  • Magnetron filament control circuit
  • Magnetron filament control circuit

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Embodiment Construction

[0029] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application generally described and illustrated in the drawings herein may be arranged and designed in a variety of different configurations. Thus, the following detailed description of the embodiments of the application provided in the accompanying drawings is not intended to limit the scope of the application as claimed, but is merely representative of selected embodiments of the application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0030] It sh...

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Abstract

The invention belongs to the technical field of magnetron control, and discloses a magnetron filament control circuit, which comprises a voltage loop, a current loop, an optocoupler, a control chip and an auxiliary power supply, the output end of the current loop is connected to the primary side of the optocoupler, and the secondary side of the optocoupler is connected with the control chip; the output end of the voltage loop is connected with the current loop; the voltage loop is used for comparing the set voltage and the sampling voltage of the magnetron filament so as to output a conditioning voltage difference to the current loop; the current loop is used for comparing the reference current equivalent voltage and the sampling current equivalent voltage of the magnetron filament so as to control the on-off of the primary side of the optocoupler; the reference current equivalent voltage is the sum of the set current equivalent voltage and the conditioning voltage difference of the magnetron filament; the control chip is used for adjusting the output PWM signal according to the output signal of the secondary side of the optocoupler so as to adjust the power of the magnetron filament; by using the magnetron filament control circuit, the temperature of the magnetron filament can be ensured to be stable.

Description

technical field [0001] The present application relates to the technical field of magnetron control, and in particular, to a magnetron filament control circuit. Background technique [0002] The magnetron is one of the key components of microwave generators used in the field of semiconductor etching and cleaning. The filament impedance of the magnetron will change due to temperature changes, and the temperature of the filament will have a significant impact on the output power of the magnetron. . Therefore, in order to obtain high stability and high accuracy microwave power, the input power of the filament must be precisely controlled. [0003] Although the current control circuit of the magnetron filament power supply also adopts the double closed-loop control of voltage and current, the two loops are relatively independent, and the switching occurs only when either the voltage or the current reaches the set threshold. Only the voltage loop or the current loop is working, ...

Claims

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Application Information

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IPC IPC(8): H05B41/36
CPCH05B41/36Y02B40/00
Inventor 李晓峰卢佳纯
Owner JIHUA LAB
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