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Liquid crystal display with transparent conductive film on sandwich insulated film formed by coating

A technology of liquid crystal display and transparent conductive film, which is applied in semiconductor/solid-state device manufacturing, instruments, circuits, etc., and can solve the problem of high total resistance

Inactive Publication Date: 2005-11-09
NEC LCD TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the total resistance of the common wiring conductor inevitably becomes high

Method used

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  • Liquid crystal display with transparent conductive film on sandwich insulated film formed by coating
  • Liquid crystal display with transparent conductive film on sandwich insulated film formed by coating
  • Liquid crystal display with transparent conductive film on sandwich insulated film formed by coating

Examples

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no. 1 example

[0070] Fig. 1 is a schematic plan view illustrating the structure of a TFT substrate of a transmissive liquid crystal display according to a first embodiment of the present invention. The TFT substrate 10 shown in FIG. 1 and the opposing substrate 17 mentioned later face each other, and a liquid crystal material is filled in the space between the TFT substrate 10 and the opposing substrate 17 to form a liquid crystal display. The liquid crystal display panel (see Figure 2 and Figure 4).

[0071] On the surface of the TFT substrate 10 facing the opposite substrate 17 side, a plurality of signal lines 11 and a plurality of scanning lines 12 intersecting the signal lines 11 are provided in a grid shape. In the vicinity of each intersection of one of the signal lines 11 and one of the scanning lines 12, a TFT 13 is formed. Therefore, the TFT 13 is arranged in a matrix.

[0072] In this embodiment, the TFT13 constitutes a high-resolution liquid crystal display panel with a CF (color fi...

no. 2 example

[0116] FIG. 10 is a schematic plan view describing the structure of a TFT substrate 50 in a transmissive liquid crystal display according to a second embodiment of the present invention. As shown in FIG. 10, on the surface of the TFT substrate 50 on the opposite substrate side not shown in the drawing, a plurality of signal lines 11 and a plurality of signal lines 11 intersecting with the signal lines 11 are arranged in a grid-like arrangement. Scan line 12. In the vicinity of the intersection of one of the signal lines 11 and one of the scanning lines 12, a TFT 13 is formed. Thus, the TFTs 13 are arranged in a matrix.

[0117] A common wiring conductor, that is, a common wiring 51 is also provided between adjacent scan lines 12. In the common storage type liquid crystal display, the common wiring conductor 51 and the pixel electrode form a storage capacitor.

[0118] The common wiring conductors 51 are coupled to each other, and a common potential is applied thereto. Therefore, c...

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Abstract

A LCD has the bus arranged in lattice mode, switch elemenets coupled with bus and the pixel electrode arranged on plated insulating sandwich membrane. When a transparent conductive film is formed on said plated insulating sandwich membrane, the temp of substrate is controlled at 100-170 deg.C. In the non-heating state, the flow speed ratio of oxygen is 1% or lower and the formed film is annealed. As a result, when the ITO film is formed on said insulating sandwich membrane, there are no residual etching dregs and the contact resistance between ITO film and lower-layer metal is decreased.

Description

Technical field [0001] The invention relates to a liquid crystal display and a manufacturing method thereof. More specifically, the present invention relates to a liquid crystal display having a high-resolution display panel in which an insulating film formed by coating, for example, an organic film or the like is used as an interlayer insulating film. Background technique [0002] Generally, a transparent type liquid crystal display is widely used, in which a thin film transistor (TFT) or a metal insulator insulator (MIM) device is used as a leading element for driving and controlling each pixel. [0003] 22A is a partially enlarged plan view showing the pixel portion of the active matrix substrate of the conventional transmissive liquid crystal display using TFT disclosed in Japanese Patent Laid-Open Publication No. 9-152625. Fig. 22B is a cross-sectional view taken along line B-B of Fig. 22A. In the active matrix substrate of the transparent liquid crystal display, a plurality...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/1343G02F1/136H01L21/336H01L29/786
Inventor 木村茂前田明寿土居悟史石野隆行
Owner NEC LCD TECH CORP
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