Filter

Abstract

In conventional arts, there has been no effective method for filtering the drainage occurred in mechanical processes, such as CMP. This is due to that the drainage is under a colloid solution state since the grinding particles contained within the CMP slurry are fine particles. In the present invention, which provides a filtration device, the drainage containing the fine particles of the colloid solution is introduced into a tank 50, circulated, and filtered by means of a second filter 2, which is construed by a gel film being disposed on the surface of a first filter 1 by suction. The suction pressure while filtering is extremely weakened in order to maintain filterability while delaying the blockage of the second filter 2. Further, the gel film of the second filter 2 sucked on the surface of a first filter 1 is capable of departing with ease while stopping the suction, and a filtration device capable of re-continuing the filtration is thus realized.

Description

technical field [0001] The present invention relates to a method for removing objects, and mainly relates to a filter device for removing fluid objects below 0.15 μm and very small objects contained in a colloid solution (sol). Background technique [0002] At present, reduction of industrial waste, sorting and reuse of industrial waste, and prevention of discharge of industrial waste into nature are important themes from an ecological point of view, and corporate issues in the 21st century. Industrial waste includes various fluids containing to-be-removed substances. [0003] These fluids are expressed in various languages ​​such as sewage, drainage, waste liquid, etc. In the following, substances contained in fluids such as water and pharmaceuticals are referred to as drainage and explained below. The waste water is removed by an expensive filter treatment device or the like, or the waste water is converted into clean water for reuse, and the classified waste or unfiltera...

AI Technical Summary

Problems solved by technology

[0020] ②Enabling embedded structure

Therefore, when the abrasive paste made of fine sand particles is filtered through a filter, the sand particles enter the pores of the filter and clogging occurs immediately, and due to frequent clogging, a large amount of treatment and drainage cannot be performed.

[0034] From the explanations so far, it can be seen that in order to remove as much as possible the substances harmful to the global environment, or to reuse the filtered fluid and the separated to be removed, various devices are added to the filtration device of the wastewater. However, if it becomes a large-scale system, the basic cost and operating cost will increase as a result.

Thus, the sewage filtering device up to now cannot be changed into the system adopted in the end.

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