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Micro-machined ultrasonic transducer (MUT) having improved sensitivity

An ultrasonic transducer and micromachining technology, applied in ultrasonic/sonic/infrasonic diagnosis, measurement of ultrasonic/sonic/infrasonic, material analysis using sonic/ultrasonic/infrasonic, etc. question

Inactive Publication Date: 2007-01-03
KONINK PHILIPS ELECTRONICS NV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But once the DC bias voltage increases to a certain point, usually called the breakdown voltage V collapse , the membrane against the cavity floor will rupture and fail to act as a receiver
Therefore, when using a DC bias voltage, the sensitivity of the MUT is limited by I=dC / dt*V collapse limit

Method used

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  • Micro-machined ultrasonic transducer (MUT) having improved sensitivity
  • Micro-machined ultrasonic transducer (MUT) having improved sensitivity
  • Micro-machined ultrasonic transducer (MUT) having improved sensitivity

Examples

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Embodiment Construction

[0028] The invention described below is applicable to a variety of different configurations of micromachined ultrasonic transducer (MUT) elements connected to bias circuits. The configuration shown below is just one possible example of using an AC signal to bias the MUT element.

[0029] figure 1 is a block diagram of a portion of a micromachined ultrasonic transducer (MUT) acoustic wave receiver 100 . The MUT acoustic receiver 100 includes an AC signal generator 102 coupled to an optional matching network 106 via a connecting line 104 . The AC signal generator 102 provides an AC induction signal on the connection line 104 . The AC induced signal, called the AC bias signal, is used to electrically bias the MUT elements in the MUT array 110 . The AC induced signal, referred to as φ, is typically generated at a frequency usually two times higher than the MUT receive signal acoustic wave detector frequency.

[0030] If the optional matching network 106 is omitted, the AC indu...

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PUM

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Abstract

An AC biasing arrangement for a micro-machined ultrasonic transducer (MUT) is disclosed. The AC biasing arrangement allows the sensitivity of each MUT element in an array to be adjusted without collapsing the MUT membrane. The sensitivity of the MUT element can be adjusted by varying the frequency of the AC bias signal supplied to the MUT element. An alternative embodiment of the invention adds a second AC bias signal having a phase opposite the phase of the first AC bias signal. This arrangement provides a neutral bias signal, thereby removing the large amplitude bias signal from the MUT element.

Description

technical field [0001] The present invention relates generally to ultrasonic transducers, and more particularly to micromachined ultrasonic transducers (MUTs) with improved sensitivity. Background technique [0002] Ultrasound transducers have been in use for quite some time and are very effective for non-invasive medical diagnostic imaging. Ultrasonic transducers are generally formed from piezoelectric elements or micromachined ultrasonic transducer (MUT) elements. The piezoelectric element is typically made of a piezoelectric ceramic such as lead zirconate titanate (PZT), with multiple elements arranged to form a transducer. The MUT is formed using known semiconductor fabrication techniques to obtain a capacitive ultrasound transducer unit which generally comprises a flexible membrane supported on a silicon substrate around its edges by insulating material. By applying contact material in the form of electrodes to the membrane or a portion of the membrane and to the bott...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01H11/06B06B1/02G01N29/24A61B8/00G01N29/36
CPCG01H11/06G01N29/36
Inventor D·G·米勒
Owner KONINK PHILIPS ELECTRONICS NV