Three-dimensional electronic speckle interferometer with phase shifting function
An electronic speckle interference and functional technology, applied in the measurement of phase influence characteristics, etc., can solve the problems of W field component errors and large measurement errors, and achieve the effects of improved sensitivity, long coherence length, and easy post-processing.
Inactive Publication Date: 2007-06-20
NO 711 RES INST CHINA SHIPPING HEAVY IND GRP
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It can be seen from the optical path structure in Figure 2 that the three-dimensional electronic speckle interferometer produced by Ettemeyer can directly and independently obtain the U and V fields, but the W field can only use the non-perpendicularly incident light as the object light, and then introduce the reference light, that is, the W field It is not independent, which must include the U field component, so the W field component has errors, and the W field is a very important component in the measurement, so the above-mentioned three-dimensional electronic speckle interferometer has the defect of large measurement error
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[0038] Please refer to FIG. 3 . FIG. 3 is a schematic diagram of the main structure of a three-dimensional electronic speckle interferometer with a phase shift function according to the present invention. In Fig. 3, the M1 and M1' dual beams measure the V field displacement, the M2 and M2' dual beams measure the U field displacement, and the ZOOM lens is equipped with a spectroscopic device 14 (see Fig. 5 ) to measure the W field displacement.
[0039] When it is necessary to accurately measure the displacement of the V field, replace the phase shifter on the M1, and the power supply of the phase shifter plus voltage is driven to produce a small optical path change, and the precise displacement can be obtained through software calculation;
[0040] When it is necessary to accurately measure the displacement of the U field, a phase shifter is replaced on M2, and the power supply of the phase shifter plus voltage is driven to produce a small optical path change, and the precise dis...
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The 3D electronic speckle interferometer with phase shift function includes three green lasers and their W field optical path, U field optical path and V field optical path. The W field optical path laser, total reflector, beam expander, light splitter to reflect one light beam to the measured object and the other light beam to the diffusing device, imager and camera with information fed to computer, and computer controlled phase shifter connected to the diffusing device. Each of the U field optical path and V field optical path includes laser, light splitting prism to make one light beam reach the measured object via three total reflectors and beam expander and the other light beam reach the measured object via two total reflectors and beam expander, imager and camera with information fed to computer, and computer controlled phase shifter on the other side of the total reflector.
Description
technical field [0001] The invention relates to a photomechanical instrument, in particular to a three-dimensional electronic speckle interferometer with a phase shift function for accurately measuring the surface micro-displacement of an object after deformation. Background technique [0002] The existing technology mainly has the following two technologies for the detection of deformed objects: [0003] One is laser holographic interference technology. The method is to first arrange the holographic optical path, perform two exposures before and after the measured object is stressed, then develop and fix the holographic dry plate, and finally realize the reproduction by laser. The defect of laser holographic interference technology for deformation and displacement is that there are many processes, that is, it must go through complicated developing and fixing wet treatment first, and a reproduction process. The above work must be strictly carried out in a darkroom; and if yo...
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Inventor 张熹吴君毅夏远富陆鹏李利平
Owner NO 711 RES INST CHINA SHIPPING HEAVY IND GRP