Multi-functional cleaning module and cleaning apparatus using the module

A multi-functional, high-speed technology, applied in cleaning methods using tools, cleaning methods using liquids, lighting and heating equipment, etc., can solve problems such as difficulty in continuous operation, large installation area of ​​cleaning parts, and reduced FAB efficiency

Inactive Publication Date: 2002-04-17
DMS CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] However, in conventional cleaning equipment, it is difficult to continuously perform the production steps including cleaning and other produc

Method used

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  • Multi-functional cleaning module and cleaning apparatus using the module
  • Multi-functional cleaning module and cleaning apparatus using the module
  • Multi-functional cleaning module and cleaning apparatus using the module

Examples

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Embodiment Construction

[0031] Hereinafter, the multifunctional cleaning module of the present invention and the cleaning equipment using the module will be described in detail with reference to the accompanying drawings.

[0032] figure 2 is a schematic perspective view showing a multifunctional cleaning module according to the present invention.

[0033] The multifunctional cleaning module according to the present invention includes a plurality of air curtains 1, eximer ultraviolet light irradiation devices 2, brushes 3, high-speed spray devices 4, and air scrapers 5, which are sequentially arranged on a plane, and the glass substrate can be These sections are inserted consecutively.

[0034] A plurality of air curtains 1 are used to isolate possible mutual interference between the above-mentioned components.

[0035] On the other hand, each component of the multifunctional cleaning module of the present invention including the air scraper is improved compared with the conventional cleaning modu...

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Abstract

The multi functional cleaning module comprises a plurality of air curtain, an eximer ultraviolet light irradiating device, a brush, a high-speed shower device, and an air knife, where they are arranged continually on a plan and the glass substrates are inserted continually into them. The cleaning apparatus using the multi functional cleaning module comprises a driving part having a loading and an unloading portions as well as the multi functional cleaning module.

Description

technical field [0001] The invention relates to a manufacturing equipment of a flat panel display, in particular to a multifunctional cleaning module whose required installation space size is reduced due to the integration of components, and a cleaning device applying the multifunctional cleaning module. Background technique [0002] Figure 1a is a block diagram of conventional cleaning equipment in flat panel display manufacturing equipment. Figure 1b is a schematic diagram of the structure. [0003] refer to Figure 1a and Figure 1b , the traditional cleaning equipment includes: a driving part with a loading part and an unloading part, with O 3 Processing part, brush part, nozzle part, and washing part of D.I. (deionized water) spray part, and drying part. [0004] The loading part of the driving part sends the glass substrate (not shown in the figure) into the cleaning apparatus, and the unloading part of the driving part sends the glass substrate out of the cleanin...

Claims

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Application Information

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IPC IPC(8): G02F1/1333B05B13/02B08B1/02B08B1/04B08B3/02B08B7/00B65G49/00B65G51/01G03F7/20H01L21/304
CPCB08B1/02B08B7/0057B08B3/022
Inventor 朴庸硕韩占烈金贞真朴炳厚
Owner DMS CO LTD
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