Comb teeth type body silicon working microchemical accelerometer

An accelerometer and micromechanical technology, applied in the direction of measuring acceleration, speed/acceleration/impact measurement, measuring devices, etc., can solve the problems of thicker movable sheet of sensitive mass, increased mass, small bonding surface, etc., to reduce lead wires Effects of increased number of outputs, resolution, and accuracy, and reduced bonding contact resistance

Inactive Publication Date: 2002-07-17
TSINGHUA UNIV
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Problems solved by technology

However, due to the small measurement capacitance of the comb-tooth structure obtained by surface processing, it affects the further improvement of the resolution and accuracy of the comb-tooth micromechanical sensor.
Replacing surface processing with bulk silicon processing is an effective way to overcome the above disadvantages. However, for the comb structure of body processing, due to the small bonding surface of the fixed teeth uniform configuration structure, and the thicker movable sheet and the increased mass of the sensitive quality of bulk silicon processing, the process After the running water came down, the b

Method used

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  • Comb teeth type body silicon working microchemical accelerometer
  • Comb teeth type body silicon working microchemical accelerometer
  • Comb teeth type body silicon working microchemical accelerometer

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Example Embodiment

[0018] The embodiment of the present invention comb-tooth body silicon processing micromechanical accelerometer (see figure 2 , 4 ). Including: a sensitive mass element 21 composed of a tooth pivot 24, a plurality of groups of movable teeth 23 and a folding beam 22, a fixed tooth 25 and a substrate 27; the movable tooth 23 extends from the tooth pivot 24 to both sides to form a double-sided comb Tooth structure, the folding beam 22 at both ends of the tooth pivot is fixed to the substrate 27 through the column 26, so that the tooth pivot and multiple sets of movable teeth are suspended and arranged in parallel with the substrate; the fixed teeth 25 are directly fixed on the substrate. Single-sided comb-tooth structure; each movable tooth of the sensitive mass element is a movable electrode of a variable capacitor, which is alternately arranged with each comb tooth of the fixed tooth to form a differential capacitor as a whole; this embodiment is different from the existing The dif...

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Abstract

The structure of comb tooth type silicon processing micromachinery accelerometer includes the tooth comb formed by means of body processing, sensing quality element formed from several groups of moving teeth and folded beam group fixed tooth biased fixed tooth and substrate, and its circuit includes the portions of microcapacitor detection and force feedback servocircuit, etc. Said invention can develope the face-processed comb tooth structure into body-processed comb tooth sturcture by means of fixed tooth biased structure, and can increase detection and thrust capacitance so as to greatly raise its resolution and accuracy. Besides, in its preamplifier low input impedance circuit is used and in closed loop feedback thrust the differential D.C. voltage mode is used, so that it can make instrument possess high accuracy.

Description

technical field [0001] The invention relates to a comb-tooth type body silicon processing micromachine accelerometer, which belongs to the field of microelectromechanical systems. Background technique [0002] Micromachined accelerometers have been developed in recent years. The ADXL50 of American AD Company is the most representative micromachined accelerometer on the market. AD company started the research of comb-tooth capacitive accelerometer in 1989. In 1990, it cooperated with German Seimens company to develop its electronic measurement circuit. It was put into production in 1993 and has now formed a series of products. This force-balanced accelerometer is made of surface processing technology, and the sensitive axis is parallel to the substrate. figure 1 A schematic diagram of its structure. The proof mass is "H" shaped. Four thin beams with a width of 2 μm in the shape of an "H" fix the detection mass on the substrate, and the detection mass can freely move along...

Claims

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Application Information

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IPC IPC(8): G01P15/125
Inventor 高钟毓王永梁董景新张嵘赵长德曹志锦袁光马新龙
Owner TSINGHUA UNIV
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