Period polarized magnesium doped lithium niobate all light switch and preparation process thereof
A technology of magnesium lithium niobate and periodic polarization, which is used in optics, nonlinear optics, electromagnetic wave transmission systems, etc. requirements and other issues, to achieve the best performance and application prospects, control the small optical power, and improve the output switching efficiency.
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[0010] The technical scheme of the present invention will be specifically described below in conjunction with the accompanying drawings: as shown in the accompanying drawings, it is a periodic poled magnesium-doped lithium niobate all-optical switch, which uses a high-magnesium-doped lithium niobate crystal along the three crystals of the crystal. Cut to the bottom in directions X, Y, and Z, the size is ~20×25×1.0 mm, and the concentration of doped magnesium is >5 mol%. The crystal is polished and processed, the fan-shaped variable periodic polarization and periodic inversion grating structure is fabricated, and the proton exchange annealing process is performed to obtain an all-optical switch of annealed proton exchange optical waveguide. The specific preparation process steps are as follows:
[0011] (1) Optically polish the ±Z surface of the wafer
[0012] (2) Photolithography on the +Z surface of the wafer
[0013] (3) Etch a metal Al electrode according to the designed m...
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