Method for preparing curved surface of shaped mask
A technology of curved surface and shadow mask, applied in the field of preparation of curved surface of formed shadow mask
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Embodiment 1
[0011] The range of coefficients of the curvature calculation formula of embodiment 1 curved surface allowance is: A1=0.08E-4~40E-4 A2=-0.08E-9~-25E-9 A3=0.8E-4~40E-4A4=-0.08 E-9~-30E-9 A5=0.08E-8~40E-8 A6=0.08E-12~40E12A7=0.08E-12~30E-12 A8=-0.08E-17~-50E-17 X, Y It is coordinate value B1=0.6E-4~25E-4 B2=-0.1E-9~-20E-9 B3=0.8E-4~40E-4B4=-0.9E-9~-20E-9 B5=- 0.8E-8~-30E-8 B6=0.8E-12~40E-12B7=0.8E-12~40E-12 B8=-0.8E~-50E-17 Curvature calculation formula coefficient of reserved amount of curved surface in embodiment 2 The range is: A1=0.1E-4~30E-4 A2=-0.1E-9~-20E-9 A3=2E-4~30E-4A4=-0.1E-9~-20E-9 A5=0.1E- 8~30E-8 A6=0.1E-12~30E-12A7=0.1E-12~30E-12 A8=-0.1E-17~-40E-17 B1=1.0E-4~20E-4B2=-0.1E -9~-15E-9 B3=1.5E-4~30E-4B4=-1.5E-9~-10E-9 B5=-1.5E-8~-20E-8 B6=2.0E-12~30E-12B7 =1.8E-12~30E-12 B8=-1.5E-17~-40E-17
Embodiment 3
[0012] The curvature calculation formula coefficient of embodiment 3 curved surface reserve amount is: A1=0.1E-4~30E-4 A2=-0.1E-9~-20E-9 A3=2E-4~30E-4A4=-0.1E- 9~-20E-9 A5=0.1E-8~30E-8 A6=0.1E-12~30E-12A7=0.1E-12~30E-12 A8=-0.1E-17~-40E-17B1=0.1E -4~30E-4 B2=-0.01E-9~-30E-9 B3=0.1E-4~50E-4B4=-0.01E-9~-30E-9 B5=-0.01E-8~-40E- 8 B6=0.01E-12~50E-12B7=0.01E-12~50E-12 B8=-0.1E-17~-60E-17
[0013] screen position
a1
μm
b1
μm
G1
Z1
mm
center
400
600
1.0
0
2
500
760
0.986
8
8.90
8
3
515
750
1.03
6.33
9
5
510
770
0.993
5
8.90
8
6
405
610
0.995
9
3.26
0
8
520
780
1.000
8.90
8
9
520
750
1.04
6.33
9
10
500
750 ...
PUM
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