Liquid spraying nozzle and producing method thereof
A technology of liquid ejection head and manufacturing method, which is applied in printing, piezoelectric devices/electrostrictive devices, etc., and can solve problems such as difficult mass production by electroforming
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Embodiment approach 1
[0048] Figure 1-Figure 3 An ink ejection head H as a liquid ejection head according to Embodiment 1 of the present invention is shown. The ink ejection head H can be placed in Figure 4 In the ink jet recording device P shown, in the ink jet head H, the ink (liquid) in the ink chamber 5 can be ejected from the nozzle hole 3b communicating with the ink chamber 5 (liquid chamber) described later to Recording is performed on a recording medium 29 (recording paper or the like).
[0049] The ink ejection head H described above is placed on a saddle 31 mounted on a saddle shaft 30 extending in the main scanning direction X. As shown in FIG. The saddle 31 is adapted to reciprocate along the saddle shaft 30, and reciprocates in the main scanning direction X. As shown in FIG. Thus, the saddle 31 constitutes relative movement means for relatively moving the ink jet head H and the recording medium 29 in the main scanning direction X. As shown in FIG.
[0050] In addition, this inkje...
Embodiment approach 2
[0070] Figure 7 Represent embodiment 2 of the present invention (with Figure 1 ~ Figure 3 The same parts are denoted by the same reference numerals, and detailed description thereof is omitted), and the entire surface of the ink chamber member 1 of the piezoelectric element 2 is constituted by the core-forming auxiliary material-containing layer 2d.
[0071] That is: in Example 2, the core formation auxiliary material containing layer 2d is not patterned, but covers the entire surface of the ink chamber member 1 of the vibrating plate layer 2c, and an electroless plating layer is used on the core formation auxiliary material containing layer 2d. The ink chamber member 1 is formed by the method.
[0072] When manufacturing this ink ejection head H, first, as Figure 8A As shown, the individual electrode layer 2b, the piezoelectric body layer 2a, the vibrating plate layer 2c, and the core formation auxiliary material containing layer 2d are sequentially formed on the substra...
Embodiment approach 3
[0077] Figure 9 Example 3 of the present invention is shown. The vibrating plate layer 2c can also serve as the core formation auxiliary material containing layer 2d.
[0078] That is, in Example 3, the nucleation assisting material is contained in the diaphragm layer 2c, and this diaphragm layer 2c also serves as the nucleation assisting material containing layer 2d. The entire surface of the ink chamber member 1 of the piezoelectric element 2 is constituted by the vibrating plate layer 2c also serving as the core formation auxiliary material containing layer 2d.
[0079] When manufacturing such an ink jet head H, at first, on the substrate 11, the films of the individual electrode layer 2b, the piezoelectric body layer 2a and the vibrating plate layer 2c are sequentially formed on the substrate 11, and then the individual electrode layer 2b, The laminated body 12 constituted by sequentially laminating the piezoelectric body layer 2 a and the vibrating plate layer 2 c. Wh...
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