Optical element holding device

A technology of optical components and fixing devices, applied in the directions of optical components, optics, electrical components, etc., can solve the problems of deformation of lens surface and mirror surface, deterioration of optical characteristics of lens and mirror, etc.

Inactive Publication Date: 2004-01-28
NIKON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This causes deformation of the lens surface and the mirror surface, causing a problem that the optical characteristics of the lens 81A and / or the mirror deteriorate, and increases various aberrations such as wavefront aberration and spherical aberration

Method used

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Examples

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no. 1 example

[0026] A first embodiment of the present invention will be described below with reference to FIGS. 1 to 5. FIG.

[0027] In this first embodiment, a scanning projection exposure apparatus of the so-called step-and-scan type includes a holding device implementing an optical element holding device according to the invention for holding an optical an element (for example, a lens, a mirror, or the like) such that its optical axis is oriented in the horizontal direction, or in an oblique direction inclined at a predetermined angle relative to the horizontal, the device Also included is a projection optics system partially embodying the tube according to the invention.

[0028] Fig. 1 schematically shows the configuration of the entire exposure apparatus including a catadioptric system as a projection optical system. In FIG. 1, the Z axis is set to be parallel to the reference optical axis AX of the catadioptric system, which includes the projection optical system 35; the Y axis is...

no. 2 example

[0062] The second embodiment of the present invention will be described below, mainly focusing on the differences from the first embodiment.

[0063] In the second embodiment, the configuration of the optical element fixing device 69 for fixing a concave mirror 43 vertically arranged in the second focusing optical system will be described in detail so that The orientation of the optical axis AX' is the horizontal direction.

[0064] Figure 6 shows a sectional view of an optical element fixing device 69 according to a second embodiment, and Figure 7 An exploded perspective view of the optical element fixing device 69 according to the second embodiment is shown.

[0065] as in Figure 6 and 7 As shown in , the mirror 70, which is an optical element forming portion of the concave mirror 43, forms a flange 70a on the outer peripheral surface. The flange 70a includes a plane P1 that includes the center of gravity Gc of the mirror 70 when the mirror 70 is disposed in the vert...

no. 3 example

[0071] A third embodiment of the present invention will be described below, mainly focusing on differences from the second embodiment.

[0072] In the third embodiment, as shown in FIGS. 8 and 9, a mirror 70 as an optical element is made of a ceramic, and a flange 70a is formed on the outer peripheral surface. The flange 70a includes three notches 70b formed at equal angular intervals on the peripheral surface. A protrusion 70c is formed at the center of each notch 70b.

[0073] Similar to the second embodiment, three holding devices 62 are provided on the frame 71 of the optical element holding device 69 , each of them having a bearing surface 63 and a clamping member 64 . Both sides of the protrusion 70 c are then clamped between the clamp 64 and the bearing surface 63 of each fixing means 62 , thereby fixing the mirror 70 within the frame 71 . Furthermore, instead of clamping both sides of the protrusion 70c by the clamping member 64 and the bearing surface 63, both sides...

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PUM

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Abstract

An optical element holding device (69) includes a holder (62) having a bearing surface (63) and a clamping member (64) for holding a flange (60a) of a lens (60), and a frame (61) coupled to a barrel (37). The holder holds the lens such that its optical axis (AX') is oriented in the horizontal direction. The holder is arranged such that a plane (P1) passing through its holding position and extending in a direction intersecting the optical axis of the lens substantially passes through the center of gravity (Gc) of the lens. The holder thus arranged stably holds the lens while preventing a moment of rotation from being produced, restrains deformation of optical surfaces of the lens, and maintains satisfactory optical performance.

Description

technical field [0001] The present invention relates to an optical element holding device for holding an optical element, and more particularly, to an optical element holding device for placing an optical element in an exposure light path of an exposure device used for manufacturing micro Used in photolithography steps in the process of devices, such microdevices as semiconductor devices, liquid crystal display devices, imaging devices, and thin-film magnetic heads, or masks such as reticles and optical masks. The present invention also relates to a tube containing the optical element fixing device, and an exposure device having the tube. The invention also relates to a method of fabricating microdevices using the exposure apparatus. Background technique [0002] Known as this type of optical element holding device is a device configured to hold a lens 81A as an optical element so that its optical axis AX is oriented in the vertical direction (gravity direction), for exampl...

Claims

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Application Information

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IPC IPC(8): G02B7/02G02B13/14G02B17/08G03F7/20
CPCG02B17/08G02B7/022G02B13/143G02B17/0892G03F7/70825G02B7/026
Inventor 西川仁
Owner NIKON CORP
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