Thallum-based high-temperature superconductive film material and its preparation method

A technology of high-temperature superconducting thin films and superconducting thin films, applied in the usage of superconducting elements, manufacturing/processing of superconducting devices, superconducting devices, etc. To avoid problems such as conductive thin films, to achieve the effect of uniform and flat surface morphology and good epitaxial characteristics

Inactive Publication Date: 2004-07-28
NANKAI UNIV
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  • Claims
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Problems solved by technology

No mention of Tl 2 Ba 2 CaCu 2 o 8 The method of making superconducting thin films, also did not

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  • Thallum-based high-temperature superconductive film material and its preparation method
  • Thallum-based high-temperature superconductive film material and its preparation method
  • Thallum-based high-temperature superconductive film material and its preparation method

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Embodiment

[0036] The Tl-Ba-Ca-Cu-O amorphous precursor film was prepared by DC magnetron sputtering. figure 1 is a schematic diagram of the magnetron sputtering device. In the figure, two sputtering targets 1 are placed symmetrically. The film substrate substrate 2 is placed on a rotatable substrate holder 3 .

[0037] The sputtering target 1 was produced by a two-step method. First use BaO 2 , CaO and CuO are matched according to the ratio of atomic ratio Ba: Ca: Cu = 2: 1: 2, after uniform mixing and grinding, burning in a flowing oxygen atmosphere at a temperature of 900°C for 10 hours, and then grinding carefully after cooling. BaCaCuO powder was made by firing under the same conditions for another 10 hours. Then, the BaCaCuO powder was mixed with Tl 2 o 3 The powders were mixed and grinded carefully, then pressed into tablets, sealed with a crucible, and fired in a flowing oxygen atmosphere at a temperature of 850°C for 1 hour. After cooling, carefully grind, press into tabl...

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Abstract

The invention relates to Tl2Ba2CaCu2O8 (Tl-2212) superconducting film and its making method. Its superconducting change temperature is higher than 100K; the critical current density is greater than 1000000 A/sq cm at 77K; at 77K and at 10GHz, its surface resistance is less than 1m Ohm. Its thickness is between 10-1000nm. Its making method mainly two steps; first, depositing Tl-Ba-Ca-Cu-O non-crystalline pioneer film; second, making the high-temperature treatment to convert the non-crystalline pioneer film into the superconducting film. The invention resolves the method to make large area double-sided Tl-2212 extended superconducting film, which can make microwave passive devices or other superconducting electronic ones.

Description

technical field [0001] The present invention relates to the preparation method of high temperature superconducting film material, it is thallium series high temperature superconducting material, especially relates to Tl-Ba-Ca-Cu-O superconducting material thin film, especially relates to Tl 2 Ba 2 CaCu 2 o 8 (Tl-2212) Method for preparing thin films of superconducting materials. Background technique [0002] High-quality high-temperature superconducting thin films are of great significance in the application of superconducting electronic devices, especially microwave passive devices. In practical applications, the superconducting transition temperature of the superconducting material is required to be at least one-third higher than the operating temperature, and it has a high critical current density and low microwave surface resistance. In the application of microwave passive devices, it is required to make high-quality double-sided films on the substrate substrate, and...

Claims

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Application Information

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IPC IPC(8): C04B35/00H01B12/06H01B13/00H01L39/12H01L39/24
CPCY02E40/642Y02E40/60
Inventor 阎少林方兰何明路荣涛
Owner NANKAI UNIV
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