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Air floation XY coordinates plane movoment platform

A coordinate plane and motion platform technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve problems such as frictional resistance that is difficult to increase acceleration, heat deformation of the motion platform, and affecting positioning accuracy, etc., to achieve structural rigidity, High positioning accuracy and reduced motion inertia

Inactive Publication Date: 2005-01-12
SHANGHAI JIAO TONG UNIV
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AI Technical Summary

Problems solved by technology

The current XY two-coordinate plane motion platform uses balls as the connection method of the relative moving part. Due to the heat generated by friction, the motion platform will be heated and deformed, which will affect the positioning accuracy. During the high-acceleration motion, a large frictional resistance will be generated, and it is difficult to accelerate. Further improve

Method used

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  • Air floation XY coordinates plane movoment platform
  • Air floation XY coordinates plane movoment platform
  • Air floation XY coordinates plane movoment platform

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Embodiment Construction

[0017] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings.

[0018] figure 1 It is the front view of the structural principle of the air-floating XY two-coordinate plane motion platform of the present invention.

[0019] figure 1 Among them, the lower platform 2 is fixed to the base 1 by the lower platform fixing bolts 16 . The first group of air-floating guide rails 3 are respectively connected to the lower platform 2 and the middle platform 4 through bolts, and the second group of air-floating guide rails 5 are respectively connected to the middle platform 4 and the working platform 7 through bolts. The Y-direction linear motor mover 10 is connected to the Y-direction drive link 9 through bolts, the Y-direction linear motor stator 11 is fixed to the base 1 through the Y-direction linear motor fixing bolts 12, and the X-direction linear motor stator 13 is connected to the X-direction linear motor. T...

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Abstract

The motion platform is composed of two linear motors perpendicular to each other, three platforms, two groups of position limited optical coupler and initial point optical coupler and two groups of optical grating ruler. Working platform, intermediate platform and lower platform are piled and connected to base. Platforms are connected through air floating guides. Intermediate platform and lower platform are movable in X direction relatively; working platform and intermediate platform are movable in Y direction relatively. Working platform and linear motors are connected through linear motor. Two linear motors drive motions of working platform along X and Y directions respectively. Stators of motor are fixed on base so as to reduce movement inertia. The invention is suitable to working platform in XY coordinate plane at high speed, high acceleration and precision.

Description

technical field [0001] The invention relates to an air-floating XY two-coordinate plane motion platform, which can be used for precise positioning of IC chip packages in microelectronics manufacturing, and belongs to the field of transmission mechanisms. Background technique [0002] In industrial control, high-speed and high-precision motion control, as a general technology in the fields of manufacturing and assembly, has always been an important research content in industry and academia, especially in the field of microelectronics manufacturing of chip (IC) packaging. The technical level of the typical motion platform of the current packaging equipment is: the motion acceleration is 6-10g, the positioning accuracy is 5-10μm, and the frequency bandwidth is 200-300Hz. With the development of science and technology, the size of chip packaging is continuously reduced, the density of I / O is increasing, and the packaging process materials are improved, which put forward higher r...

Claims

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Application Information

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IPC IPC(8): H01L21/68
Inventor 丁汉李运堂
Owner SHANGHAI JIAO TONG UNIV
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