Tunable capacitors using fluid dielectrics
A technology of capacitors and dielectrics, which is applied in the field of variable capacitors and can solve problems such as small change ranges
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[0074] 50nm of chromium is deposited on single crystal alumina to form a strip capacitor. Two micrometers of copper and 100 nanometers of gold were then deposited over the chromium. Using photolithography, these metal layers are etched into two electrodes separated by a certain gap. The capacitance of this system was measured and the dielectric constant of single crystal alumina between the two electrodes was about 9-10. Then put pure water between the two electrodes, and then measure the capacitance value. The dielectric constant at this time is 80-90. After cleaning and drying the whole system, repeat the above experiment several times, each time the result is the same. Thus, the expected ten-fold change in permittivity was confirmed.
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