Liquid crystal panel, liquid crystal display device, and electronic equipment
A liquid crystal display, liquid crystal panel technology, applied in liquid crystal materials, static indicators, instruments, etc., can solve the problems of uneven surface of indium tin electrodes, difficult to respond to actual output speed, etc.
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[0096] Embodiments of the present invention will be described in detail with reference to the drawings. Now, a first embodiment of the present invention will be described. Image 6 A cross-sectional view of a unit structure of a TFT array in a liquid crystal panel according to an embodiment of the present invention is given. Image 6 The TFT array shown is a polysilicon TFT array formed by converting amorphous silicon to polysilicon.
[0097] Such as Image 6 As shown, the polysilicon TFT has a structure in which a silicon oxide film 28 is formed on a glass substrate 29 and a polysilicon layer is partially formed thereon. The polysilicon layer is formed by depositing amorphous silicon on the silicon oxide layer 28, thereafter converting the amorphous silicon to polysilicon by annealing with an excimer laser, and thereafter patterning the polysilicon. A gate oxide film was formed at a thickness of 10 nm on the surface of the polysilicon layer. exist Image 6 Among them, the ga...
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