Substrate delivery in-out device, method and substrate delivery appts. and method

A technology of conveying device and substrate processing device, which is applied in the direction of conveyor objects, transportation and packaging, lighting and heating equipment, etc., which can solve the problems of large-scale clean room and large installation space, and achieve the effect of structural simplification
CN1600658AInactive Publication Date: 2005-03-30SHINKO ELECTRIC CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
SHINKO ELECTRIC CO LTD
Publication Date
2005-03-30
Estimated Expiration
Not applicable · inactive patent

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Abstract

An installation / removal device (1) for putting or removing a substrate (A) into or from a storage container (10) in which substrates are stored, the installation / removal device comprising a mounting table (31) on which the substrate (A) is mounted, a holder (32) for holding the substrate (A) provided on the mounting table (31) so as to be movable in the direction of installation / removal of the substrate (A), and rollers (37) provided on the mounting table which support the substrate (A), being held by the holder (32), such that it is movable in the direction of installation / removal.
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Description

technical field

[0001] The present invention relates to a substrate loading and unloading device and a substrate loading and unloading method for loading and unloading plate-shaped substrates such as semiconductor substrates and liquid crystal substrates from or into storage containers, The aforementioned substrate transfer apparatus and substrate transfer method for transferring a substrate to a processing apparatus or the like.

[0002] This application claims the priority of Japanese Patent Application No. 2003-296453 and Japanese Patent Application No. 2003-296454 filed on August 20, 2003, and the contents thereof are incorporated herein. Background technique

[0003] At present, in the manufacturing process of substrates such as semiconductors, a plurality of substrates are stored in a storage container, and are carried out from the storage container by a substrate loading and unloading device and sent to a substrate transferring device, and are transferred by the subst...

Claims

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