Piping structure having leak detection function and leak detector

Abstract

A covering member having a valve encloses a flexible hose to form a double pipe. Gas supply pipe fittings are attached to respective ends of the double pipe to form a hermetic space between the flexible hose and covering member. The covering member also has a pressure-measuring device to which a decision unit equipped with an alarm device is connected. The same gas or liquid as the one flowing through the flexible hose is introduced to the hermetic space from the valve provided in the covering member, and sealed in the hermetic space by closing the valve. The pressure in the hermetic space is set so as to be higher than the pressure produced in the flexible hose when the gas or liquid is flowing. The pressure-measuring device measures the pressure in the hermetic space while the gas or liquid flows in the flexible hose, and the decision unit compares the measured value with a reference value. As a result, if the value measured by the pressure-measuring device is lower than the reference value, the decision unit decides that a breakage has occurred and then the alarm device activates an alarm.

Description

technical field [0001] The present invention relates to a pipeline structure with leak detection function for gas and liquid to flow through, and a leak detector attached to the pipeline structure, especially relates to preferably in the manufacture of such as semiconductor devices, liquid crystal display devices and other devices, etc. Pipeline structures and leak detectors with leak detection functions used in precision equipment. Background technique [0002] Generally, a piping structure using a stainless steel flexible hose is connected to a chemical vapor deposition device used to manufacture precision devices such as semiconductor devices, liquid crystal display devices, and others to supply gas such as argon gas into the gas chamber. FIG. 1 is a cross-sectional side view showing a conventional pipe structure. FIG. 2 is a cross-sectional side view showing a situation when the conventional pipe structure 100 shown in FIG. 1 is ruptured. As shown in FIG. 1 , in a conv...

AI Technical Summary

Problems solved by technology

If the air 105 mixes with the gas such as argon 104 or other gases flowing through the piping structure 100, it will adversely affect the process in the chemical vapor deposition apparatus

However, the traditional pipeline structure 100 cannot detect the leakage of the gas flowing through it.

Therefore, there is a problem in using the conventional pipe structure 100 in that it takes a long time to conduct various investigations until it is found that the process in the chemical vapor deposition apparatus has deteriorated due to a leak; another problem is that even if the leak is recognized , also takes a long time to determine the source of the leak or breach 110

However, traditional methods cannot solve this problem

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