Optical type appearance testing method and optical type appearance testing device
An appearance inspection device and appearance inspection technology are applied in the fields of optics, measuring devices, and material analysis through optical means, which can solve problems such as the influence of inspection results, and achieve the effect of reducing false inspections and reducing costs
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[0032]Embodiments of the present invention will be described below with reference to the drawings. Here, in order to make the description concrete, a case where a film mask on which a wiring pattern is formed is inspected will be described as an example. This example is not intended to limit the present invention. That is, the present invention is not limited to the inspection of thin film masks, but is also effective for inspection of flexible thin plate substrates.
[0033] figure 1 It is a side view schematically showing the overall configuration of an optical visual inspection device according to an embodiment of the present invention. figure 2 is viewed from above the device figure 1 floor plan of the structure. figure 1 with figure 2 Among them, the optical appearance inspection device is composed of a stage 2 , an imaging unit 3 , a Z-axis base 4 , an X-axis base 5 , an air ejection member 6 , and a nozzle 7 .
[0034] figure 2 Among them, the stage 2 is forme...
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