Equipment for measuring Seebeck coefficient and resistivity of semiconductor material

Abstract

A device for measuring Seebeck coefficient and resistivity of semiconductor material is featured as connecting temperature controller two ends to power and heating element in tube furnace separately, setting sample table in furnace tank, connecting reference resistance to conversion switch in series, connecting the conversion switch to data collection module and constant - current source, using high temperature wire to input sample voltage as well as Seebeck potential of cold and hot end sample clamp to computer through data collection module.

Description

technical field [0001] The invention belongs to the technical field of semiconductor testing devices, in particular to a device for simultaneously measuring the Seebeck coefficient and resistivity of semiconductor materials at different temperatures. Background technique [0002] Seebeck coefficient and resistivity are one of the most important thermoelectric transport performance parameters of materials. Accurate determination of them has very important application value and theoretical significance for in-depth study of thermoelectric transport mechanism of semiconductor materials, especially for in-depth research and development of new semiconductor thermoelectric materials and devices. Existing test device related to Seebeck coefficient and resistivity mainly has the following problems: 1) the test of Seebeck coefficient and resistivity is basically carried out separately by different test devices, and the determination of Seebeck coefficient is usually It is measured b...

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Problems solved by technology

Existing test device related to Seebeck coefficient and resistivity mainly has the following problems: 1) the test of Seebeck coefficient and resistivity is basically carried out separately by different test devices, and the determination of Seebeck coefficient is usually It is measured by the temperature difference method at both ends, and the resistivity measurement is mostly measured by the four-probe method (see ①H.J.Goldsmid.J.Phys.E.Sci.Instrum., 1986, 19:921-922; ②SB-100 Seebeck Measurement System. MMR Technologies, Inc. (USA), http: / / www.mmr.com ), so there are disadvantages such as the test sample cannot be used universally, the measurement process is complicated and time-consuming

2) For semiconductor thermoelectric materials, one of its main applications is thermoelectric power generation. During the application of thermoelectric power generation, the hot end generally works at a relatively high temperature (for example, the current SiGe-based semiconductor thermoelectric materials used for isotope thermoelectric power supplies have a hot end temperature as high as 800 ℃), so high-temperature thermoelectric performance testing and research are extremely important. At present, there is no related device that can simultaneously test the Seebeck coefficient and resistivity of materials at temperatures above 600 ℃ (see ①Yamashita Hiroyuki; Horio Yuuma.JP2004022912; ②PPMS-Physical Property Measurement System.QUANTUMDESIGN, http: / / www.qdusa.com .)

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