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Fliming clamp mask and its filming apparatus

A coating equipment and jig technology, applied in the field of coating jig masks and coating equipment, can solve the problems of general products without structure and inconvenience, and achieve the effects of increasing the uniformity of the coating layer, technological progress, and increasing yield.

Inactive Publication Date: 2006-05-03
PRODISC TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] This shows that the above-mentioned existing coating equipment obviously still has inconvenience and defects in structure and use, and needs to be further improved urgently
In order to solve the problems existing in the coating equipment, the relevant manufacturers have tried their best to find a solution, but no suitable design has been developed for a long time, and the general products do not have a suitable structure to solve the above problems. This is obviously a problem. Issues that relevant industry players are eager to solve

Method used

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  • Fliming clamp mask and its filming apparatus
  • Fliming clamp mask and its filming apparatus
  • Fliming clamp mask and its filming apparatus

Examples

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Embodiment Construction

[0053] In order to further explain the technical means and effects that the present invention takes to achieve the intended purpose of the invention, below in conjunction with the accompanying drawings and preferred embodiments, the specific implementation and structure of the coating jig mask and coating equipment thereof proposed according to the present invention , features and their effects are described in detail below.

[0054] see image 3 Shown is a schematic structural view of a coating device with a coating jig mask according to a preferred embodiment of the present invention. The coating device 3 of the preferred embodiment of the present invention includes a coating jig 32 and a coating jig mask 31 .

[0055] In this embodiment, the coating fixture 32 is located at the top of a cavity 36 of the coating equipment 3, and the coating fixture 32 is to hold at least one substrate to carry out the coating process; the coating fixture mask 31 is used To cover the coatin...

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Abstract

The invention relates to a film coating tool mask and coating device. Wherein, the mask is used to cover a coat tool in coat device that has at least one base plate for coating process and forms at least one coat layer on base plate. The mask comprises a first screen board, at least two second screen board connected to two sides of the first plate, and a third screen board with at least one opening connected with the second plate; arranging the third plate opposite to the first; the first, second and third screen boards form a space for coat tool, the opening uncovers at least part base plate. This invention uses the mask with opening to correct the coat thickness, prevents coating the non-coat surface and being scored, and increases the good rate of base plate.

Description

technical field [0001] The present invention relates to a coating jig mask and coating equipment thereof, in particular to a coating jig mask and coating equipment (MASK FOR COATING JIG AND COATING APPARATUS THEREOF). Background technique [0002] The coating process is widely used in the industry, and is generally used in the metal processing industry, semiconductor industry, and optoelectronic industry. In recent years, due to the rapid development of the semiconductor industry and the optoelectronic industry, significant progress has been made in coating technology. [0003] see figure 1 As shown in FIG. 1 , it is a structural schematic diagram of a known coating equipment. The conventional coating equipment 1 includes a motor 11 , an umbrella-type bearing seat 12 , a shutter 13 and a coating source 14 . Wherein, the umbrella-type bearing seat 12 is arranged on the shaft center of the motor 11, and the shape of the umbrella-type bearing seat 12 is similar to an umbrel...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C8/04C23C14/24C23C14/34C23C16/04
Inventor 徐振源陈明华李思贤
Owner PRODISC TECH INC
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