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Method and devices for measuring dynamic response error of position sensor

A dynamic response and measurement method technology, applied in the field of measurement, can solve problems such as inconvenient use, complex models, and small amplitude of sine functions

Inactive Publication Date: 2006-07-05
BEIHANG UNIV
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  • Application Information

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Problems solved by technology

[0018] Using the above method to build the PSD dynamic response error model has the following disadvantages: (1) The scanning trajectory of the light source is determined, and the application range is very limited
Not only does the light source need to be modulated into a sinusoidal function, but the amplitude of the sinusoidal function is also required to be small, which limits the scope of use of the above method
(2) The established model is only suitable for one-dimensional PSD structure
(3) The model is very complicated, and there are two parameters N, ε need to be calculated separately according to the physical parameters R and C of PSD with different structures, which is inconvenient to use

Method used

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  • Method and devices for measuring dynamic response error of position sensor

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Embodiment

[0063] Measure the one-dimensional PSD dynamic response error.

[0064] A one-dimensional PSD (model S1662) produced by Japan Hamamatsu Photonics Co., Ltd. and the above-mentioned measuring device were used. When the light source scans in a straight line at a constant speed, the scanning trajectory is the center line of the PSD photosensitive surface (y=L 2 / 2mm, x=L 1 ×0.05~L 1 ×0.95mm), according to the above PSD dynamic response error model, the curve diagram of the dynamic response error produced by the S1662 PSD device as a function of the scanning position is obtained under different light source scanning speeds V (m / s).

[0065] Measure the dynamic response error of a 2D quadrilateral PSD.

[0066] Using the two-dimensional PSD (model S1200) produced by Japan Hamamatsu Optoelectronics Co., Ltd. and the above-mentioned measuring device, when the light source scans in a straight line at a constant speed, the scanning trajectory is the center line of the PSD photosensit...

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Abstract

The invention belongs to the field of measuring technique, relating to a method and device for measuring dynamic response error of a PSD (Position Sensitive Detector). The method includes the steps of: firstly determining a dynamic response model of the PSD under the continuous scanning and irradiation of a light source and then making error measurement. The invention is simple in method, convenient to use, high accuracy and applied to calculating the dynamic response errors of PSD of various electrode structures.

Description

technical field [0001] The invention belongs to the technical field of measurement, and relates to a measurement method and device for measuring the dynamic response error of a PSD position sensor. Background technique [0002] A position sensitive detector (PSD) is a photoelectric device sensitive to the position of the incident light spot, and its working principle is based on the lateral photoelectric effect of a large-area PN junction. The photoelectric effect can be described by the Lucovsky equation. When the photosensitive surface of the PSD is locally and non-uniformly irradiated by the light spot, a lateral voltage related to the position of the light spot and parallel to the photosensitive surface will be established on the photosensitive surface. If the light spot is continuously irradiated and an external circuit is connected to the electrode of the PSD, then A current flowing to the two poles is formed, and the magnitude of the two-pole current is related to th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/03G01B11/00
Inventor 张广军尚鸿雁
Owner BEIHANG UNIV