Delivery system for glass substrates or articles like these

Abstract

The present invention provides a conveying system capable of delivering and receiving glass substrates at the same time without a loss in process time for intermittent operation and capable of setting conveying mode in response to cycle time of a manufacture line, in regard to sheets conveyance between an exchanger and the manufacture line. In this conveyance system for glass substrate or the like, which conveys works such as a glass substrate in unit of cassette between a cassette storage part and a plurality of exchangers arranged in parallel with each other with a conveying means and which conveys a work of sheet between the exchanger and the manufacturing line, a conveyor is arranged in relation to the cassette to be vertically elevated inside the exchanger, and a conveyor dedicated to deliver the works to the manufacturing line and a conveyor dedicated to receive the works discharged from the manufacturing line are separately arranged in two stages in upper and lower, and a plurality of conveyors are arranged in parallel with each other along the direction of the exchangers arranged in parallel with each other. Furthermore, the conveyor arranged inside the exchanger can be vertically elevated in response to height of both the dedicated conveyors.

Description

technical field [0001] The present invention relates to a storage unit (such as an automatic warehouse) for substrates in the manufacturing process of TFT (Thin Film Transistor), LCD (Liquid Crystal Display), PDP (Plasma Display Panel), EL (Electroluminescence), etc. Conveyor system for glass substrates etc. between production lines. Background technique [0002] In the prior art, in the so-called sheet-type conveying system in the LCD production line such as the production line of etching, photoresist, etc., various conveying systems are arranged between the automatic warehouse and the production line side, and the sheet-type conveying system Glass substrates are transported to the production line from an automatic warehouse (stacking crane) that is a storage unit for cassettes stored in multiple layers, and glass substrates that have been processed on the production line are transported to the automatic warehouse. [0003] As this conveyance system, the conveyance system ...

AI Technical Summary

Problems solved by technology

[0010] Therefore, in the conveyance system described in the above-mentioned Patent Document 1, the tact time is lost, and the substrates in either supply or recovery have to be kept waiting, and the productivity cannot be improved.

[0011] In addition, the above-mentioned conveying system is one-way conveying, so the packing density of the substrates in the conveying path is low.

Images