Catalyst for preparing carbon nanocoil, method for preparation thereof, method for preparing carbon nanocoil and carbon nanocoil
A technology of carbon nanocoils and manufacturing methods, applied in catalyst activation/preparation, molecular sieve catalysts, chemical instruments and methods, etc., which can solve problems such as difficult thinking
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Embodiment 1
[0180] [Example 1: Manufacture of carbon nanocoils from Fe·In·Sn oxide thin films]
[0181] A Fe·In·Sn oxide thin film with a film thickness of 200 nm was formed on the (001) plane of the Si substrate. pass figure 2 In the shown carbon nanocoil manufacturing device, the oxide film is used as a starting catalyst to manufacture carbon nanocoils at about 700°C. C at 60sccm 2 h 2 The gas was used as a carbon compound gas as a source gas, and 200 sccm He gas was used as a carrier gas.
[0182] The gas was circulated, and the substrate was taken out after 1 second, 5 seconds, 10 seconds, 1 minute, 5 minutes, and 30 minutes, and the state of the substrate surface was observed with a scanning electron microscope. From the state of the surface of each substrate, the change of the Fe·In·Sn oxide thin film and the growth rate of the carbon nanocoil were confirmed.
[0183] Figure 11 It is the SEM image of the Fe·In·Sn oxide thin film taken at 50,000 magnification. It can be seen...
Embodiment 2
[0188] [Example 2: C by 1 sccm 2 h 2 Formation of the resulting carbide catalyst particles]
[0189] In Example 1, since the C of the raw material gas is supplied at 60 sccm 2 h 2 Gas, the growth rate of carbide catalyst particles is too fast. Therefore, it is discussed to provide C at 1sccm 2 h 2 gas, made of Fe 3 InC 0.5 How the first intensity peak of the resulting diffraction intensity increases over time.
[0190] C 2 h 2 Gas was set at 1 sccm, He was set at 50 sscm, and the heating temperature was 700°C. formed with Figure 12 Substrates of identical Fe·In·Sn oxide thin films were set in the reaction chamber. This substrate was continuously irradiated with X-rays, and the diffraction intensity at 2θ=39.6° (near about 40°) at the first peak was measured over time.
[0191] Figure 13 is a time-course graph of the first peak of the diffraction intensity at 2θ of 39.6° (approximately 40°). The movement of this first peak shows that the Fe 3 InC 0.5 process ...
Embodiment 3
[0193] [Example 3: Fe 3 InC 0.5 Particle Size Control of Catalyst Microparticles]
[0194] For Fe 3 InC 0.5 The particle size (diameter s) of the catalyst particles can be controlled, and the growth conditions can be changed. In Example 2, the growth temperature, that is, the heating temperature of the substrate (temperature of the reaction chamber) can be changed between 650°C and 700°C to form carbide catalyst particles, and carbon nanocoils can be grown using the carbide catalyst particles.
[0195] C 2 h 2 Gas was set to 1 sccm, He was set to 50 sscm, and the heating temperature was 650°C and 700°C. formed with Figure 12 In exactly the same way, the substrate with Fe·In·Sn oxide film as the starting catalyst is set in the reaction chamber. On this substrate make Fe 3 InC 0.5 Catalyst microparticles are grown, and carbon nanocoils are grown using this substrate.
[0196] Figure 14 It is a scanning electron microscope image of a carbon nanocoil grown by carbide...
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