Resonance type micromechanical accelerometer

An accelerometer and mechanical technology, applied in the direction of measuring acceleration, speed/acceleration/impact measurement, measuring devices, etc., can solve the problems of insufficient sensitivity and resolution, and achieve the effects of improving sensitivity, realizing differential output, and good manufacturability

Inactive Publication Date: 2006-10-11
BEIHANG UNIV
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0003] The technical problem of the present invention is to overcome the deficiencies of the prior art and provide a high-sensitivity res...

Method used

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  • Resonance type micromechanical accelerometer

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Embodiment Construction

[0009] Such as figure 1 As shown, the present invention includes a substrate 1, a proof mass 2, a cantilever beam 21, two symmetrical lever amplification mechanisms 13, 23, two symmetrical tuning forks 17, 27, driving electrodes, detecting electrodes, tooth hubs 18, 28, The whole structure is an axisymmetric figure. The mass block 2 is in the shape of "back", and the middle of the mass block 2 is a cantilever beam 21, two lever amplification mechanisms 13, 23, two tuning forks 17, 27, tooth hubs 18, 28, driving electrodes, and detection electrodes. On the periphery of the mass block 2 are two stops 12,22. The "back"-shaped mass block 2 is designed to realize a larger mass block under the limited volume of the element, so that the acceleration can be efficiently converted into inertial force. The lever mechanism 13 is composed of three-stage enlarged rods. The anchor points 11, 14, 15, and 20 on the lever mechanism 13 are connected to the substrate through bonding. One end of...

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Abstract

The invention discloses a resonance micro chemical accelerometer, which comprises a basic plate, a weigh block, a suspend beam, a lever amplifying device, a sound fork, a driving electrode, a detecting electrode, a tooth axle and a backstop. Wherein, said structure is axial symmetry; the weight block is circle whose middle part is mounted with a suspend beam, a lever amplifying device, a sound fork, a driving electrode, a detecting electrode, a tooth axle and a backstop; the backstop is outside the weight block; the circle shape of weight block can make the element own larger weight block in limited volume; the resonance beam has two ends to be fixed with sound forks, while two ends are connected to the outer element with narrow necks, to effectively reduce the energy couple between the resonance beam and outer structure; two symmetry sound forks can realize differential output of resonance frequency. The invention can improve the sensitivity, resolution and detecting accuracy of accelerometer.

Description

technical field [0001] The invention relates to a resonant micro-mechanical accelerometer, which belongs to the field of micro-mechanical sensors in micro-electro-mechanical systems (MEMS). As a micro-inertial device, it is widely used in fields such as automotive electronics, aerospace, and weaponry. Background technique [0002] MEMS is in a period of development, its technology and market are not yet mature, but its broad development prospects and huge social and economic benefits are well known to the world, and micro-machined accelerometers are the most successful representatives. Research on micromechanical accelerometers began in the early 1970s, and there are various forms such as piezoresistive, capacitive, piezoelectric, force balance, thermal convection, resonant, and tunnel current. Compared with many forms, the resonant micro-mechanical accelerometer outputs a frequency signal. This quasi-digital signal has high anti-interference ability and stability, and it is...

Claims

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Application Information

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IPC IPC(8): G01P15/097
Inventor 樊尚春任杰
Owner BEIHANG UNIV
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