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Ultra-minisize accelerometer

An accelerometer, ultra-small technology, applied in the direction of measuring acceleration, velocity/acceleration/shock measurement, acceleration measurement using inertial force, etc., can solve the problems of increasing costs, and achieve the effect of low manufacturing cost and high sensitivity

Active Publication Date: 2006-11-22
WUHAN FINEMEMS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Consumers already use PCB peripheral boards for this purpose, however it adds expense to what is often a cost sensitive product

Method used

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  • Ultra-minisize accelerometer

Examples

Experimental program
Comparison scheme
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Embodiment Construction

[0023] Embodiments of the present invention are further described below in conjunction with the accompanying drawings:

[0024] see Figure 1a , an accelerometer is formed on a silicon substrate 100, and a cavity 107 is formed on the silicon substrate below the heater 104 and thermopiles 102, 103, 105, 106. Thermopiles arranged in two orthogonal directions each form a pair at a distance of approximately X / D=0.2 to achieve greater sensitivity. The heater 104 is implemented with four resistors made of polysilicon arranged in small squares. The heater 104 and the two pairs of thermopiles are all suspended above a cavity 107 with four aluminum metal bridges 101 . The current flowing through the heater 104 is connected to the external power supply through the four bridge, so the temperature of the gas around the heater increases and the temperature gradient is established. The "T-shaped" distributed mass 110 is on another cavity, and a Z-axis accelerometer is formed by using a be...

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PUM

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Abstract

The disclosed ultra-small accelerometer comprises: a heater and a thermalpile both on silicon substrate to convert temperature difference into voltage signal by Seebeck effect and provide acceleration signal, a hot bubble, and a bottom cavity. Wherein, it uses a beam distribution check block and a piezoresistor to form a Z-axis accelerometer signal output. This invention has high sensitivity with low cost.

Description

technical field [0001] The invention relates to an accelerometer, in particular to an ultra-small accelerometer. technical background [0002] Accelerometers are used in a wide variety of applications such as automotive airbags and suspension systems, computer hard drive protection, LCD projectors, precision detonation systems for bombs and missiles, and mechanical vibration monitors. Many mechatronic devices can be used to measure acceleration, such as piezoresistive and capacitive accelerometers. [0003] Most commercially available accelerometers today are actually two-dimensional, meaning they can only measure acceleration in the X-Y plane of the sensor chip. This is due to the two-dimensional limitation of the CMOS process structure. For mass production, most commercial accelerometers are processed by a micromachining process compatible with the CMOS process. However, 3D accelerometers are required in many applications such as navigation, hard drive protection, cell p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/12G01P15/00
Inventor 刘胜陈斌侯斌
Owner WUHAN FINEMEMS