Cumulate molecular beam source for organic thin film

Abstract

The invention relates the molecular beam source used to cumulate organic film, which can form homogeneous film on the surface of large scale basement film without producing deposition or segregation at the opening of film forming material. The valve 33 is installed in the space from molecule heating part 12 to molecule deactivation opening 14, and the heater 18 and 19 are installed on the side of the molecule deactivation opening 14. On the side of the molecule deactivation opening 14 there is outer guiding element 13, and in the outer guiding element 13 there is inner guiding element 16. Between the outer guiding element and inner guiding element there is molecule deactivation channel 17, whose diameter increases along the deactivation direction. The heater 18 and 19 are installed on outer guiding element 13 and inner guiding element 16, and the heater 20 is installed on molecule deactivation opening 14.

Description

technical field

[0001] The present invention relates to a molecular beam source for accumulation of organic thin films for heating a material to be formed in thin film form on the surface of a solid object or substance such as a substrate, etc., thereby melting and evaporating the thin film forming material; i.e. Generating evaporated molecules to grow thin films on the surface of solid objects, more particularly, it relates to a molecular beam source for the deposition of thin films of organic materials suitable for use in the deposition of thin films of organic materials on substrates such as A thin film of a solid object such as a solid object forms a surface. Background technique

[0002] In recent years, attention has been paid to organic thin film devices, for example, organic electroluminescence (ie, EL) and / or organic semiconductors as typical or representative members thereof. For such thin film elements, the organic material is heated in a vacuum to spray vapor on...

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