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Device for gas phase sedimentation on substrate

A vapor deposition and equipment technology, which is applied in the field of vapor deposition equipment on the substrate, can solve the problem of not having the ability to measure the amount of oil and gas, and achieve the effect of reducing oil loss

Inactive Publication Date: 2007-05-02
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The above equipment does not have the ability to measure the amount of oil and vapor flowing out

Method used

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  • Device for gas phase sedimentation on substrate
  • Device for gas phase sedimentation on substrate
  • Device for gas phase sedimentation on substrate

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Embodiment Construction

[0024] Figure 1 shows a perspective view of an apparatus 1 for vapor deposition under vacuum on a material substrate, eg an organic material. Above the device 1, a stacked substrate 38 is guided along B-B. If the substrate is a synthetic film, the substrate can be moved over the device 1 as described in JP 2001-279425. In order to produce sharp-edged strips, the distance between the substrate 38 and the device 1 is usually very small.

[0025] The device 1 comprises an oil pan 2 in which the oil to be evaporated is arranged. A heat insulating layer 3 is arranged on the oil pan 2, and a heating plate 4 is arranged on the heat insulating layer 3. On this heating plate 4 is positioned a nozzle bar 5 which has a gap 6 at its top edge. It is also possible to provide several separate nozzles instead of the gap 6 . Along the line A-A there is provided a slide 7 with several holes, only the holes 10 of which are visible in FIG. 1 . The gap 6 is delimited by two regions 24 , 25 . ...

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PUM

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Abstract

The invention relates to an arrangement for the vapor deposition on substrates. It includes a pan as well as a cover with linearly disposed bores. Above this cover is seated a seal-off device, which also includes openings. Through the seal-off device the bores of the cover can be opened or closed, all bores being addressed simultaneously. Through the seal-off device different evaporation rates can be set within an extremely short time.

Description

technical field [0001] The invention relates to an apparatus for vapor deposition on a substrate according to the preamble of claim 1 . Background technique [0002] The composite membrane is usually provided with a metal layer under vacuum conditions, for example in order to render the composite membrane gas-impermeable, or to make it electrically conductive. If not all areas, but only certain traces, are made conductive, then those areas which do not receive the metal layer are made to have strips of oil film. Due to these oil films, the metal cannot adhere to the laminate. These strips of oil film are applied by means of an oil vaporizer. [0003] For the production of metal-free strips, in particular for the production of capacitors, in which an oil-filled container is provided with at least An outlet pipe (DE 3922187 A1). The outlet nozzle of the outlet pipe terminates below the oil level in the coating chamber, in close proximity to the substrate to be coated. [...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/54
Inventor 甘特·克莱姆
Owner APPLIED MATERIALS INC