Methods and systems for processing microfeature workpieces with flow agitators and/or multiple electrodes

A stirrer, micro-feature technology, applied in chemical instruments and methods, jitter/oscillation/vibration mixers, circuits, etc., can solve problems such as disturbing electric field uniformity, difficulty, affecting uniformity, etc.

Inactive Publication Date: 2007-05-09
塞米用具公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Another disadvantage is that the paddles may interfere with the uniformity of the electric field generated by the electrodes, which further affects the uniformity of application of material to or removal of material from the workpiece
A further disadvantage of the foregoing structure is that the conta

Method used

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  • Methods and systems for processing microfeature workpieces with flow agitators and/or multiple electrodes
  • Methods and systems for processing microfeature workpieces with flow agitators and/or multiple electrodes
  • Methods and systems for processing microfeature workpieces with flow agitators and/or multiple electrodes

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Embodiment Construction

[0039] As used herein, the term "microfeature workpiece" or "workpiece" refers to a substrate on which and / or in which microelectronic devices are integrally formed. Typical microdevices include microelectronic circuits or components, thin film recording heads, data storage elements, microfluidic devices, and other products. Micromachines or micromachined devices are included within this definition because they are fabricated with techniques very similar to those used in integrated circuit fabrication. The substrate can be a semiconductor (such as a doped silicon wafer or a gallium arsenide wafer), a non-conductor (such as various ceramic substrates) or a conductor. In some cases, the workpiece is generally circular, while in other cases, the workpiece has other shapes, including rectilinear shapes.

[0040] In the following, several embodiments of integrated tools for wet chemical processing of microfeatured workpieces are presented for depositing metal or electrophoretic re...

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Abstract

A tool with installation module is disclosed. The installation module has an aligning system and comprises a positioning element for precise positioning the reactor and the workpiece transferring device which moves the workpiece into and out of the reactor. The module is fixed at the relative position between the positioning elements of the reactor, therefore, the workpiece transferring device do not need to be re-marked when the reactor is detached and changed by another one. The reactor includes an agitator for agitating the treating fluid on the treated surface of the workpiece. The agitator, the reactor and the electrodes in the reactor is configured to reduce the probability of generating electric shadow by the agitator, and the 3-D effect to electric field, when the beater and/or workpiece receiver move relatively, is considered.

Description

[0001] Cross References to Related Applications [0002] This application claims U.S. provisional application No. 60 / 484,603 (filing date is July 1, 2003), U.S. provisional application No. 60 / 484,604 (filing date is July 1, 2003), pending U.S. provisional application No. 60 / 476,786 (filed June 6, 2003), pending U.S. Application No. 10 / 734,098 (filed December 11, 2003), and U.S. Application No. 10 / 734,100 (filed December 11, 2003) 11), all of which are incorporated by reference herein in their entirety. technical field [0003] The present invention relates to methods and systems for processing microfeatured workpieces with flow agitators and / or multiple electrodes, which include reactors and tools with multiple electrodes and / or enclosed reciprocating agitation device. Background technique [0004] Microdevices are fabricated by depositing and processing several layers of material on a single substrate in order to create a large number of individual devices. For example, ...

Claims

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Application Information

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IPC IPC(8): B01F11/00C25D7/12C25D17/02
Inventor P·R·麦克休G·J·威尔逊D·J·伍德拉夫N·齐默尔曼J·J·埃里克森
Owner 塞米用具公司
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