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Adhesive chuck device

A technology for chucks and substrates, applied in identification devices, nonlinear optics, optics, etc., can solve problems such as increased manufacturing costs, high failure rates, glass plate damage, etc., to avoid the risk of impact or discharge, and the failure rate Lowered, safe and correct alignment effect

Inactive Publication Date: 2007-06-20
SHIN ETSU ENG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] However, in such a conventional adhesive chuck device, in the case of Patent Document 1, there is a problem that in order to peel off the adhesive member and the substrate, the adhesive sheet must be rolled up and pressed against the roll. The speed is synchronized with the speed so that it moves horizontally in the same winding direction, or the tool table and the tool base must be raised to pass the tool to cut the adhesive sheet. Each action requires multiple driving sources such as motors or actuators, resulting in structural complication
[0013] Furthermore, in the case of Patent Document 2, in order to raise the bonding member in the opening of the pressure plate, a plurality of actuators are required for each bonding member, while in the case of Patent Document 3, each Each bonding member requires a rotation actuator and an actuator for driving up and down to move the bonding member back while rotating, respectively, resulting in a complicated structure.
[0014] Therefore, Patent Documents 1 to 3 not only have a high incidence of failure due to the complicated peeling structure, but also have the following problems, that is, especially when they are arranged in a substrate assembly device or a substrate transfer device including a substrate bonding machine, etc. , it is difficult to replace the original electrostatic chuck and other substrate holding mechanisms with the bonding chuck device of the present invention
[0015] Moreover, there is a problem that when the above-mentioned actuator is an electromagnetic motor such as a motor, it will easily generate heat. For example, a substrate made of glass is sensitive to thermal changes, and it will shrink by about 4 μmm with only a change of 1°C. Due to this effect, it is difficult to align the substrates correctly with respect to each other
[0016] And there is also the following problem, that is, when the adhesive is held in an ambient gas from atmospheric pressure to a predetermined degree of vacuum, and when the adhesion is peeled off and opened, the change from atmospheric pressure to a predetermined degree of vacuum, but if the motor is used If there is an electromagnetic actuator in the vacuum, at some point in the vacuum there may be a plasma discharge, which will lead to the destruction of the glass plate
[0017] Moreover, there is a problem that, even if the above-mentioned actuator is a driving source such as a cylinder, it is difficult to downsize because it has a sealed structure that can operate telescopically, so that the entire device becomes large and causes an increase in manufacturing cost.
[0018] However, especially large-scale substrates are prone to distortion and deformation. In order to firmly bond and hold such easily deformable substrates and open and peel them off, it is necessary to use a strong force to make the bonding parts contact or separate the substrates. In order to obtain such a strong force The actuator must be upsized, resulting in a heavier weight

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0112] In this first embodiment, as shown in FIGS. 1( a ) to ( c ), a plurality of openings 1 b are opened only in the holding surface 1 a of the upper holding plate 1 to support the outer peripheral portion of the movable film 3 . A rigid portion 3a is provided on a part of the movable membrane 3 facing the surface A1 of the substrate A, and a ring-shaped adhesive is fixed along the opening edge of each opening 1b located on the secondary side of the movable membrane 3. In the state where the rigid body part 3a moves upward and enters the opening part 1b, the bonding member 4 is brought into contact with the upper substrate A and bonded and held, and the movable film 3 is directed toward the secondary side. The space (closed space) S protrudes and deforms downward, and the substrate A bonded and held on the bonding surface 4 a of the bonding member 4 is forcibly peeled off.

[0113] In addition, in the illustrated example, due to the spatial relationship, only two openings 1b...

Embodiment 2

[0140] This embodiment 2, as shown in Fig. 3 (a) ~ (d), is provided with the air channel 6a that penetrates along the reciprocating motion direction of the above-mentioned movable film 3, and vacuum suction is performed from the air channel 6a and supply, for example, nitrogen gas etc. When the vacuum adsorption mechanism 6 constituted by the gas supply source 6b is mounted on the upper substrate A, the upper substrate A is sucked and held by vacuum suction through the air passage 6a of the vacuum adsorption mechanism 6, and then peeled off from the adhesive member 4 as required. For example, gas such as nitrogen is sprayed from the air channel 6a to the surface A1 of the upper substrate A. This structure is different from the first embodiment shown in FIGS.

[0141]In the illustrated example, an air passage 6a is perforated so as to pass through the movable membrane 3 and the rigid body part 3a provided on a part thereof in the vertical direction. The penetrating position of ...

Embodiment 3

[0150] In this embodiment 3, as shown in Fig. 4 (a) to (c), the fixing position of the above-mentioned bonding member 4 is not set at the opening edge of the opening 1b, but is changed and set at the protruding position of the movable film. 3. At the front end surface of the rigid body part 3a at the central part, at the same time, the pressure difference between the primary side space (pneumatic chamber) 5 and the secondary side space (closed space) S of the movable membrane 3 is applied to the bonding member 4. In a state where the bonding surface 4a and the holding surface 1a are substantially in the same plane or slightly (about 100 μm) protruding, the upper substrate A is brought into contact with the bonding surface 4a of the bonding member 4 to bond and hold it. The movable membrane 3 deforms upward toward the primary-side space (pneumatic chamber) 5 and enters the opening 1b in a concave shape, thereby forcibly peeling the adhesive surface 4a of the adhesive member 4 fr...

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Abstract

The invention aims to surely mount and remove a board by a pneumatic mechanism having a simple structure. On a board side of a holding board (1), a movable film (3) which can be deformed in a direction intersecting with a board side plane (1a) in an opening part (1b) provided on the board side plane (1a), and an adhesive member (4) for holding a board (A) by adhesion by facing the board are provided. By reciprocating the movable film (3) by a pressure difference between a primary side space (5) and a secondary side space (S) of the movable film (3), an adhesive surface (4a) of the adhesive member (4) is permitted to abut to the board (A) to hold the board by adhesion, the adhesive surface and the board are forcibly separated and the board (A) is smoothly peeled from the adhesive surface (4a) of the adhesive member (4).

Description

technical field [0001] The present invention relates to an adhesive chuck device used in a substrate assembly device including a substrate bonding machine used in, for example, a liquid crystal display (LCD) or a plasma display (PDP), etc. In the manufacturing process of flat panel displays, glass substrates such as CF glass and TFT glass or synthetic resin substrates are bonded and held together. [0002] In detail, it relates to a bonding chuck device for detachably holding a substrate by bonding to a holding plate. Background technique [0003] Conventionally, in a substrate bonding machine that overlaps two substrates, the substrate is held by an electrostatic chuck. However, with the increase in the size of the substrate in recent years, it is difficult to manufacture a large-sized electrostatic chuck, and even if it can be manufactured, the cost It will also be very high. [0004] Then, in order to solve these problems, there is an adhesive chuck device that uses an ...

Claims

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Application Information

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IPC IPC(8): G09F9/00G02F1/13
CPCG02F1/1333G02F1/13
Inventor 横田道也大谷义和板下光邦
Owner SHIN ETSU ENG
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