Titanium dioxide film synthesizing method and the product thereof
a titanium dioxide and film technology, applied in the field of thin film synthesis, can solve the problems of time-consuming titanium dioxide synthesizing method, limited application, and bulk titanium as a substra
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[0016] The first embodiment of the present invention is to synthesize titanium dioxide films on a homogenous substrate (titanium) or heterogeneous substrate (silicon or any of a variety of semiconductors, metal, glass, ceramics, or polymers). For illustration only, the first embodiment is described to synthesize titanium dioxide films on a silicon substrate.
[0017] The method of the first embodiment of the present invention includes two stages, namely, the first stage of pre-deposition and the second stage of electrochemical anodic oxidation. The first stage of pre-deposition is to deposit a titanium film on a silicon wafer by sputtering. Titanium film can also be deposited on a bulk titanium or substrate of any of a variety of other materials. The second stage of electrochemical anodic oxidation is to synthesize a nano-network structured titanium dioxide film on the titanium-coated silicon wafer in highly alkaline electrolytes, such as KOH (potassium hydroxide). In other words, the...
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