Titanium dioxide film synthesizing method and the product thereof

a titanium dioxide and film technology, applied in the field of thin film synthesis, can solve the problems of time-consuming titanium dioxide synthesizing method, limited application, and bulk titanium as a substra

Inactive Publication Date: 2005-05-19
LU FU HSING +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Conventional electrochemical anodic oxidation for synthesis of titanium dioxides uses bulk titanium as a substrate, which has limited application.
This titanium dioxides synthesizing method is time-consuming because bulk titanium must be immersed in highly alkaline solutions for at least several hours.
However, for application of anatase TiO2 there are technical problems to be settled, more particularly the problem of how to join firmly the titanium dioxides and the substrates.
Conventional obtaining satisfactory adhesion between anatase titanium dioxides and substrates is still not an easy task.
Further, because anatase titanium dioxides are photocatalytic, substrates made of organic materials tend to be decomposed by the titanium dioxides due to photocatalytic reactions.
This is another problem to be conquered.

Method used

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  • Titanium dioxide film synthesizing method and the product thereof
  • Titanium dioxide film synthesizing method and the product thereof
  • Titanium dioxide film synthesizing method and the product thereof

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Embodiment Construction

[0016] The first embodiment of the present invention is to synthesize titanium dioxide films on a homogenous substrate (titanium) or heterogeneous substrate (silicon or any of a variety of semiconductors, metal, glass, ceramics, or polymers). For illustration only, the first embodiment is described to synthesize titanium dioxide films on a silicon substrate.

[0017] The method of the first embodiment of the present invention includes two stages, namely, the first stage of pre-deposition and the second stage of electrochemical anodic oxidation. The first stage of pre-deposition is to deposit a titanium film on a silicon wafer by sputtering. Titanium film can also be deposited on a bulk titanium or substrate of any of a variety of other materials. The second stage of electrochemical anodic oxidation is to synthesize a nano-network structured titanium dioxide film on the titanium-coated silicon wafer in highly alkaline electrolytes, such as KOH (potassium hydroxide). In other words, the...

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Abstract

A titanium dioxide films synthesizing method includes the step of coating a titanium film on the surface of a homogenous (or heterogeneous) substrate, and the step of using the titanium-coated substrate as anode in an electrolyte to synthesize an nano-structured titanium dioxide film with single anatase phase on the surface of the titanium film by employing electrochemical anodic oxidation at room temperature.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to the synthesis of thin films on substrates and, more particularly, to a titanium dioxide film synthesizing method to synthesize nano-structured anatase titanium dioxide films on homogeneous or heterogeneous substrates. [0003] 2. Description of the Related Art [0004] Nano-structured titanium dioxides have many applications owing to their superior photocatalytic, biocompatible, and many other properties. Conventional electrochemical anodic oxidation for synthesis of titanium dioxides uses bulk titanium as a substrate, which has limited application. There is known another titanium dioxide synthesizing method that directly immersing bulk titanium in highly alkaline solutions (for example, 5M NaOH), forming porous titanium dioxide films. Porous titanium dioxide films made according to this method often exhibit a mixed phase, such as Na2Ti5O11+TiO2 (rutile), or TiO2 (rutile+anatase). Moreov...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): C25D9/00C25D11/26
CPCC25D11/26
Inventor LU, FU-HSINGYANG, YU-SHAO
Owner LU FU HSING
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