Liquid medicine supplying device and method for venting air from liquid medicine supplying device

Abstract

The amount of chemical liquids dispensed by a chemical liquid supply apparatus is stabilized and dispensing accuracy is remarkably improved. A pump discharges a liquid accommodated in a liquid tank. A filter is connected to the pump through a pump outlet flow path to which a pump discharge-side valve for opening / closing the flow path is provided. A dispensing nozzle (liquid dispense portion) is connected to the filter through a liquid discharge flow path to which a discharge valve for opening / closing the flow path is provided. A vacuum source communicates with the filter through an exhaust flow path to which a deaeration valve for opening / closing the flow path is provided.

Description

TECHNICAL FILED OF THE INVENTION [0001] The present invention relates to a chemical liquid supply apparatus for discharging a predetermined amount of liquids such as chemical liquids and, for example, to a chemical liquid supply apparatus and a deaerating method thereof, which are suitably used for coating a photoresist liquid on a surface of a semiconductor wafer. BACKGROUND OF THE INVENTION [0002] In each manufacturing process of various kinds of technical fields such as a semiconductor wafer manufacturing technique, a liquid crystal display manufacturing technique, a magnetic disk manufacturing technique, and a multilayer printed circuit board manufacturing technique, there has been used a chemical liquid such as a photoresist liquid, spin-on glass liquid, polyimide resin liquid, purified water, developer, etchant, cleaning liquid, or organic solvent, and a chemical liquid supply apparatus is used for coating such chemical liquid. For example, as such, a chemical liquid supply ap...

AI Technical Summary

Benefits of technology

The present invention is a chemical liquid supply apparatus that aims to improve the dispensing accuracy of chemical liquids. The apparatus includes a pump, a filter, a liquid discharge portion, and a vacuum source. By using a deaerating method, the apparatus can remove bubbles from the filter and stabilize the amount of chemical liquid dispensed. This will lead to improved manufacturing yield of products and high quality semiconductor integrated circuits. The technical effects of the invention include stable chemical liquid dispensing and improved manufacturing yield.

Problems solved by technology

However, in such a conventional chemical liquid supply apparatus, it has become clear to be unable to remove completely the bubbles collected in a filtration film of the filter due to matter such as flow resistance of the filtration film, and osmotic pressure of the chemical liquid.

As far as the bubbles cannot be exhausted completely from the inside of the filtration film of the filter, it is difficult to dispense stably the chemical liquid and improve the dispense accuracy.

Accordingly, the improved manufacture yield of products is not expected.

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