Apparatus and method for terminating probe apparatus of semiconductor wafer
a technology of semiconductor wafers and probes, applied in the direction of temperature compensation modifications, measurement devices, instruments, etc., can solve the problems of difficult to test the characteristics of semiconductor devices in a wide operating temperature range, and achieve the effects of reducing or minimizing parasitic capacitance, improving test performance and mechanical stability
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[0022] In the following description of a preferred embodiment, reference is made to the accompanying drawings, which form a part hereof, and in which is shown by way of illustration a specific embodiment in which the invention may be practiced. It is to be understood that other embodiments may be utilized and structural changes may be made without departing from the scope of the present invention.
[0023] For purposes of explanation, numerous specific details are set forth in the following description in order to provide a thorough understanding of the present invention. However, it will be evident to one of ordinary skill in the art that the present invention may be practiced without some of these specific details.
[0024] While this invention is susceptible of embodiment in many different forms, there is shown in the drawings and will herein be described in detailed preferred embodiment of the invention with the understanding that the present disclosure is to be considered as an exe...
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