Re-assembly process for MEMS structures
a technology of mems and assembly process, which is applied in the field of fabricat can solve the problems of destroying entire arrays, difficult to align all microstructures with one another, and difficult to fabricate structures comprising arrays of microstructures
Inactive Publication Date: 2006-07-20
FORMFACTOR INC
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- Application Information
AI Technical Summary
Benefits of technology
Enables the fabrication of arrays with precise alignment and the ability to replace defective microstructures, improving the yield and quality of microstructure arrays by ensuring accurate positioning and allowing for the use of separate substrates for fabrication and assembly.
Problems solved by technology
Fabricating a structure comprising an array of microstructures, such as spring contacts, can be difficult.
For example, if all of the microstructures are fabricated on a single substrate that is to be their final support substrate in the overall structure being made, a defect in one microstructure may cause the entire array to be discarded.
On the other hand, if the microstructures are not fabricated on their final support substrate, it may be difficult to align all of the microstructures with respect to one another.
Method used
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[0030] For the purposes of promoting an understanding of the principles of the invention, reference will now be made to the embodiments illustrated in the drawings and specific language will be used to describe the same. It will nevertheless be understood that no limitation of the scope of the invention is thereby intended, and alterations and modifications in the illustrated device and method and further applications of the principles of the invention as illustrated therein, are herein contemplated as would normally occur to one skilled in the art to which the invention relates.
[0031]FIGS. 1-3 illustrate a technique for fabricating alignment structures on substrate, which may be a silicon wafer. The alignment structures are shown as pits, but other types of alignment structures such as groves or holes are also contemplated. FIGS. 1-3 also illustrate a technique for fabricating alignment structures on a master substrate, which may also be a silicon wafer. A master substrate will be...
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Abstract
Methods of fabricating an array of aligned microstructures on a substrate are disclosed. The microstructures may be spring contacts or other microelements. The methods disclosed include construction of an alignment substrate, alignment of die elements with the alignment substrate, and fixation of the aligned die elements to a backing substrate.
Description
BACKGROUND OF THE INVENTION [0001] The present invention relates generally to a method of fabricating an array of microstructures. [0002] An example of microstructures is a spring contact. An array of spring contacts may be used as probes in probe card assemblies (among other uses). Examples of spring contacts are disclosed in U.S. application Ser. No. 08 / 802,054 filed Feb. 18, 1997, and examples of probe card assemblies are disclosed in U.S. Pat. No. 5,974,662, both of which are incorporated by reference herein. [0003] Fabricating a structure comprising an array of microstructures, such as spring contacts, can be difficult. For example, if all of the microstructures are fabricated on a single substrate that is to be their final support substrate in the overall structure being made, a defect in one microstructure may cause the entire array to be discarded. On the other hand, if the microstructures are not fabricated on their final support substrate, it may be difficult to align all ...
Claims
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IPC IPC(8): H01L21/44B81B7/04G01R1/067G01R1/073G01R3/00H01L23/498
CPCB81B7/04Y10T29/4913B81C3/002B81C2203/051G01R1/06711G01R1/06744G01R1/07314G01R1/07342G01R3/00H01L23/49827H01L2924/15174H01L2924/0002B81C1/00214Y10T29/49151Y10T29/49004Y10T29/49126Y10T29/49204Y10T29/49147H01L2924/00
Inventor ELDRIDGE, BENJAMIN N.MATHIEU, GAETAN L.
Owner FORMFACTOR INC