System and method for inspecting a workpiece surface by analyzing scattered light in a back quartersphere region above the workpiece

a technology for workpiece surfaces and scattered light, applied in the direction of image enhancement, instruments, image data processing, etc., can solve the problems of increasing the difficulty and expense of their maintenance and repair, and the amplitude and direction of scattered light from scratch, so as to achieve high sensitivity and reliability
US20060192949A1Inactive Publication Date: 2006-08-31ADE CORPORATION
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
ADE CORPORATION
Publication Date
2006-08-31
Estimated Expiration
Not applicable · inactive patent

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Abstract

A surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features back collectors disposed in the back quartersphere, outside the incident plane, for collecting light scattered from the surface of the workpiece. The back collectors are disposed at a relative minimum in the portion of scattered light attributable to haze relative to the portion of scattered light attributable to defect scatter portion, or, alternatively, at a relative minimum in the Rayleigh scatter.
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Description

CROSS-REFERENCE TO RELATED APPLICATION

[0001] The present application claims the benefit of the filing date of U.S. Provisional Patent Application No. 60 / 638,529, filed Dec. 19, 2004, currently pending, the entire disclosure of which is incorporated herein by reference.STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT

[0002] N / A BACKGROUND OF THE INVENTION

[0003] 1. Field of the Invention

[0004] The present invention relates to technology for the inspection of a surface or surfaces of a workpiece, such as a semiconductor wafer, chip, or the like. More particularly, it relates to apparatus and methods for inspection of such workpiece surfaces using electromagnetic energy, e.g., light, to scan the surface to obtain characteristics of the surface or other information concerning the surface.

[0005] 2. Description of the Related Art

[0006] There are a number of applications in which it is desirable or advantageous to inspect a surface or surfaces of a workpiece to obtain in...

Claims

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