Purge system for a product container and table for use in the purge system

Inactive Publication Date: 2006-12-28
TDK CORPARATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

[0014] The present invention has been made in view of the above circumstances, and therefore an object of the present invention is to provide a purge system that is capable of preventing a pressure

Problems solved by technology

However, as the diameter of the wafer increases, there arises a problem in obtaining the high clean envelopment through the above coping in terms of costs or the like.
However, in the case where a pressure balance between the gas inlet side and the gas outlet side is not kept in the above structure, a pressure difference between the interior of the pod 2 and the exterior thereof occurs, thereby leads a fear that the pod 2 is deformed.
Further, in the case of a pod that contains a large substrate that is 300 mm or more in di

Method used

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  • Purge system for a product container and table for use in the purge system
  • Purge system for a product container and table for use in the purge system
  • Purge system for a product container and table for use in the purge system

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Embodiment Construction

[0043] Now, a description will be given of embodiments of the present invention with reference to the accompanying drawings. FIG. 1 is a diagram schematically showing a purge system according to an embodiment of the present invention. To be more specific, FIG. 1 schematically shows a structure of a pod 2, and a table side inlet port 14 and a table side outlet port 16 which are disposed on a table 53 of FIG. 6, taken along a vertical section thereof. In the figure, the same structures as those of the respective structures shown in FIG. 5 as the conventional art are denoted by identical references for description.

[0044] Referring to FIG. 1, a sealing member 18 that is fixed to the table 53 side is interposed between an inlet port 7 of the pod 2 and a table side inlet port 14 that is connected to the inlet port 7. Therefore, a gas inlet system is completely sealed from an external space of the pod 2. On the contrary, no sealing member 18 is interposed between a outlet port 9 and a tab...

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Abstract

For the purpose of preventing a pressure difference from occurring between an interior of an FOUP and an exterior at the time of purging the interior of the FOUP, a communication path that communicates with the exterior of the FOUP and the interior of an outlet path is provided with respect to the outlet path that extends from a table side outlet port which is disposed on a table on which the FOUP is placed, and an external atmosphere is introduced to the outlet path through the communication path when a pressure difference starts occurring between the interior and the exterior of the FOUP.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a product container employed for containing a product such as a semiconductor, a panel for a flat panel display, or an optical disk in a product manufacturing process conducted under a high clean envelopment, and a so-called load port for conducting an open / close operation of the container. In particular, the present invention relates to a purge system for replacing a gas sealed in a so-called front-opening unified pod (FOUP) where the product is used as an object to be contained in processing of wafer of the above product, mainly, a semiconductor wafer that is 300 mm in diameter, and a table used in structuring the purge system. [0003] 2. Related Background Art [0004] Up to now, in a process of manufacturing a semiconductor device, an overall factory in which a wafer is subjected to various processing is brought to a clean room state to cope with a demand for high cleaning during th...

Claims

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Application Information

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IPC IPC(8): B65B31/00
CPCH01L21/67393H01L21/67775H01L21/67763H01L21/02
Inventor OKABE, TSUTOMUSUZUKI, HITOSHI
Owner TDK CORPARATION
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