Method and Apparatus for Inspecting Defects
a defect detection and defect technology, applied in the direction of material analysis through optical means, measurement devices, instruments, etc., can solve the problems of defect detection performance decline, and difficulty in high sensitivity detection of short-circuit defects at the bottom of patterns, so as to achieve high-precision defect detection
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second embodiment
[0099]A second embodiment of an inspection apparatus according to the present invention is described below with reference to FIG. 15, a block diagram of the inspection apparatus. In the description below, the same constituent elements as those of the first embodiment are omitted and focus is placed primarily upon differences. The inspection apparatus 1 includes, as appropriate, first illumination optics 10, second illumination optics 1510, detection optics 20, a substrate conveying circuit 30, a focal measuring circuit 50 (not shown), an image-processing circuit 60, a control and processing circuit, and an interface circuit 90.
[0100]The first illumination optics 10 is constructed using, as appropriate, a laser light source 11, reflecting mirrors 16 and 17 that guide in a required direction the light emitted from the laser light source 11, a polarization control unit 13, a condensing lens 15, and an optical splitting element 1501 provided between the reflecting mirror 17 and the pola...
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