Piezoelectric Transducers and Inertial Sensors using Piezoelectric Transducers

a piezoelectric transducer and inertial sensor technology, applied in the field of microelectromechanical inertial sensor, can solve the problems of increasing the cost of the resulting mems-based device, reducing the accuracy of the piezoelectric transducer, and not being particularly compatible with the widely used standard cmos process
US20100058861A1Inactive Publication Date: 2010-03-11ANALOG DEVICES INC
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Patent Information

Authority / Receiving Office
US · United States
Patent Type
Applications(United States)
Current Assignee / Owner
ANALOG DEVICES INC
Publication Date
2010-03-11
Estimated Expiration
Not applicable · inactive patent

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Abstract

Transducers comprising a frame structure made of piezoelectric material convert energy, through piezoelectric effect, between electrostatic energy associated with voltage differential between the electrodes sandwiching the frame structure and mechanical energy associated with deformation of the frame structure. Inertial sensors such as gyroscopes and accelerators, including inertial sensors comprising ring resonators, utilize said transducers both to generate oscillations of their resonators and to sense the changes in such oscillations produced, in the sensors' frame of reference, by Coriolis forces appearing due to the movement of the sensors.
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Description

TECHNICAL FIELD

[0001] The present invention relates generally to inertial sensors, and more particularly to microelectromechanical inertial sensors for measuring a rotational motion, such as ring gyroscopes.BACKGROUND ART

[0002] It is known in the prior art to use inertial motion sensors to track the position, orientation, and velocity (linear or angular) of objects in the inertial reference frame, without the need for external references. Inertial motion sensors generally include gyroscopes, accelerators, and other motion-sensing devices. Gyroscopes are well-known and used for measuring or maintaining orientation based on the principles of conservation of angular momentum. Vibrating structure gyroscopes, due to their simplicity and low cost, gained popularity since 1980s over conventional, rotating gyroscopes. The physical principle of a vibrating structure gyroscope is very intelligible: a vibrating object tends to keep vibrating in the same plane as its support is rotated. In engine...

Claims

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