Fluid feed pump, fluid circulation device, medical device and electronic device
a technology of fluid circulation and pump chamber, which is applied in the direction of piston pumps, positive displacement liquid engines, pump components, etc., can solve the problems of extending the time required for lowering the internal pressure of the pump chamber, and reducing the volume of the excluded fluid out of the pump chamber having the reduced volume. , to achieve the effect of reducing the volume reducing the internal pressure of the pump chamber, and high flow resistan
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[0071]FIG. 1 illustrates the structure of a fluid feed pump 100 according to one embodiment. As illustrated, the fluid feed pump 100 of this embodiment differs from the fluid feed pump shown in FIG. 13 by providing an outlet buffer chamber 118. More specifically, in the fluid feed pump 100 of the embodiment, part of a pump chamber 102 is formed from a diaphragm 104. A piezoelectric element 106 is placed in a casing 108. An inlet buffer chamber 112 is provided via a check valve 110 above the pump chamber 102. A fluid is supplied through an inlet channel 114 into the inlet buffer chamber 112. The pump chamber 102 is connected with the outlet buffer chamber 118 via an outlet channel 116, and a fluid channel 122 is further connected with the outlet buffer chamber 118.
[0072]When a driving signal is applied to the piezoelectric element 106 to extend the piezoelectric element 106, the diaphragm 104 is deformed to reduce the volume of the pump chamber 102. This causes the fluid in the pump ...
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