Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same

Abstract

A thin film deposition apparatus used to manufacture large substrates on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus using the same, the apparatus inclues a loading unit fixing a substrate onto an electrostatic chuck; a deposition unit including a chamber maintained in a vacuum state and a thin film deposition assembly disposed in the chamber, separated from the substrate by a predetermined distance, to deposit a thin film on the substrate fixed on the electrostatic chuck; an unloading unit separating the substrate on which a deposition process is completed, from the electrostatic chuck; a first circulation unit sequentially moving the electrostatic chuck on which the substrate is fixed, to the loading unit, the deposition unit, and the unloading unit; and a second circulation unit returning the electrostatic chuck separated from the substrate to the loading unit from the unloading unit, wherein the first circulation unit passes through the chamber when passing through the deposition unit.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]This application is a divisional of U.S. patent application Ser. No. 12 / 869,830, filed Aug. 27, 2010, which claims priority to and the benefit of Korean Patent Application Nos. 10-2009-0079765, filed on Aug. 27, 2009, and 10-2010-0011480, filed on Feb. 8, 2010, the entire content of which is incorporated herein by reference.BACKGROUND[0002]1. Field[0003]An aspect of the present invention relates to a thin film deposition apparatus and a method of manufacturing an organic light-emitting display apparatus by using the same, and more particularly, to a thin film deposition apparatus that can be easily used to manufacture large substrates on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display apparatus by using the thin film deposition apparatus.[0004]2. Description of the Related Art[0005]Organic light-emitting display apparatuses have a larger viewing angle, better contrast cha...

AI Technical Summary

Benefits of technology

[0008]An aspect of the present invention provides a thin film deposition apparatus that may be easily manufactured, that may be easily used to manufacture large-sized display apparatuses on a mass scale and that allows high-definition patterning, and a method of manufacturing an organic light-emitting display apparatus by using the thin film deposition apparatus.

[0016]According to another aspect of the present invention, the connection member may seal a space between the deposition source and the deposition source nozzle unit, and the patterning slit sheet.

Problems solved by technology

However, when the FMM is used, it is not easy to form an organic thin film pattern on a large substrate, such as a mother glass having a large size.

In other words, when the large-sized mask is used, the mask may be bent due to self-gravity, and the organic thin film pattern may be distorted due to the bent mask.

This is not desirable for high definition patterning which is being increasingly used recently.

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