Pump and actuator
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[0050]Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
[0051]FIG. 1 is a diagram showing a general configuration of a pump according to the embodiment of the present invention.
[0052]The pump according to the present embodiment is a thermally driven molecular flow pump which can pressurize or depressurize a gas by using a thermal transpiration flow.
[0053]A porous membrane 10 disposed in a casing 20 is made of a material having a low thermal conductivity (0.2 [W / (m·K)] or less) such as a silica aerogel membrane in which a large number of pores 12 are formed in a silicon dioxide (silica, SiO2) material. A first space 16 is formed between the casing 20 and a front surface (first surface, one main surface) 10a of the porous membrane 10. A second space 18 is formed between a heat sink (heat radiation device) 14 disposed in the casing 20 and a rear surface (opposite second surface different from the first surface (one main surface)) 10b o...
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