Pump
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[0062]FIG. 1 shows a vacuum pump 10 in accordance with an embodiment of the invention in a schematic representation. The vacuum pump 10 comprises a side passage pump stage 12 which has at least one stator element 14, an electric motor 22 for the rotational driving of a rotor element of the side passage pump stage 12, a cooling plate having drive electronics 20 arranged thereon for the motor 22 and a high vacuum pump stage 24.
[0063]The pump 10 furthermore comprises a coolant circuit 25 which comprises a coolant inlet 44 accessible from outside the pump 10 and a coolant outlet 46 of the vacuum pump 10 accessible from outside the pump 10, wherein the inlet 44 and the outlet 46 are connected to one another in a coolant conducting manner via coolant passages 18, 26 of the coolant circuit 25. The arrow tips in FIG. 1 characterize the coolant flow direction from the inlet 44 to the outlet 46.
[0064]The coolant passage 18 serves for the cooling of the side passage pump stage 12 and is bounde...
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