Pump

Inactive Publication Date: 2014-09-04
PFEIFFER VACUUM GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0053]An excessive heating of the side passage pump and of the motor and/or of the drive electronics which deteriorates the pump behavior or the operating life of the pump can thereby be effectively avoided and a high pump performance as well as a high operating life of the pump can be ensured. The drive electronics can be configured, in addition to the control of the motor, also for evaluating signals which are delivered by sensors of the vacuum pump such as a temperature sen

Problems solved by technology

It was recognized in accordance with the invention that the heat generation caused in the region of the side passage pump stage by its pumping effect results in known pumps in a deterioration of the operating properties of the pump, whereby, on the one hand, the pe

Method used

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Embodiment Construction

[0062]FIG. 1 shows a vacuum pump 10 in accordance with an embodiment of the invention in a schematic representation. The vacuum pump 10 comprises a side passage pump stage 12 which has at least one stator element 14, an electric motor 22 for the rotational driving of a rotor element of the side passage pump stage 12, a cooling plate having drive electronics 20 arranged thereon for the motor 22 and a high vacuum pump stage 24.

[0063]The pump 10 furthermore comprises a coolant circuit 25 which comprises a coolant inlet 44 accessible from outside the pump 10 and a coolant outlet 46 of the vacuum pump 10 accessible from outside the pump 10, wherein the inlet 44 and the outlet 46 are connected to one another in a coolant conducting manner via coolant passages 18, 26 of the coolant circuit 25. The arrow tips in FIG. 1 characterize the coolant flow direction from the inlet 44 to the outlet 46.

[0064]The coolant passage 18 serves for the cooling of the side passage pump stage 12 and is bounde...

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PUM

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Abstract

A vacuum pump has at least one side passage pump stage which comprises a side passage bounded by at least one stator element and having a coolant circuit for cooling the vacuum pump with a coolant, wherein the coolant circuit has at least one coolant passage for the side passage pump stage which is bounded at least regionally by the stator element.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The invention relates to a pump having at least one side passage pump stage which comprises a side passage bounded by at least one stator element.[0003]The invention generally relates to the sector of pumps and in this respect in particular to the sector of vacuum pumps. The invention is not restricted to vacuum pumps. All statements relating generally to pumps, however, also apply to vacuum pumps.[0004]2. Description of the Prior Art[0005]Pumps, in particular vacuum pumps, are used in different technical processes, for example in semiconductor manufacture, to convey gaseous media away out of a volume to be evacuated and in particular to produce a vacuum required for the respective process. In addition to high-vacuum pump stages such as Holweck pump stages or turbomolecular pump stages, side passage pump stages are used which, on the one hand, are suitable for producing a pure vacuum having a low end pressure and which ...

Claims

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Application Information

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IPC IPC(8): F04D29/58F04D19/04
CPCF04D19/04F04D29/58F04D23/008F04D29/5806F04D29/584F04D17/168F04D25/06F04D29/5813
Inventor SHIRINOV, ALEKSANDRSOEHNGEN, WOLFGANGGOGOL, TORSTENOBERBECK, SEBASTIAN
Owner PFEIFFER VACUUM GMBH
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