Pump

Abstract

A vacuum pump has at least one side passage pump stage which comprises a side passage bounded by at least one stator element and having a coolant circuit for cooling the vacuum pump with a coolant, wherein the coolant circuit has at least one coolant passage for the side passage pump stage which is bounded at least regionally by the stator element.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The invention relates to a pump having at least one side passage pump stage which comprises a side passage bounded by at least one stator element.[0003]The invention generally relates to the sector of pumps and in this respect in particular to the sector of vacuum pumps. The invention is not restricted to vacuum pumps. All statements relating generally to pumps, however, also apply to vacuum pumps.[0004]2. Description of the Prior Art[0005]Pumps, in particular vacuum pumps, are used in different technical processes, for example in semiconductor manufacture, to convey gaseous media away out of a volume to be evacuated and in particular to produce a vacuum required for the respective process. In addition to high-vacuum pump stages such as Holweck pump stages or turbomolecular pump stages, side passage pump stages are used which, on the one hand, are suitable for producing a pure vacuum having a low end pressure and which ...

AI Technical Summary

Benefits of technology

The invention is about a cooling system for a side passage pump stage that prevents the pump from overheating and wearing out quickly. The system uses a coolant circuit with a stator element to efficiently transfer the pump's thermal energy away from the pump, improving its performance and lifespan. The coolant circuits can be connected in series or parallel, allowing for flexibility in cooling requirements.

Problems solved by technology

It was recognized in accordance with the invention that the heat generation caused in the region of the side passage pump stage by its pumping effect results in known pumps in a deterioration of the operating properties of the pump, whereby, on the one hand, the performance properties of the pump are impaired and, on the other hand, a substantial load on the pump components occurs in their operation which increases the susceptibility to maintenance and failure of the pump and which reduces their operating life to be expected.

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