Confocal Displacement Sensor

Abstract

The confocal displacement sensor includes a first optical fiber, to a first incident end of which light for light projection is input, the first optical fiber outputting the light from a first emission end, a second optical fiber, a second incident end of which is disposed to be opposed to the first emission end, the second optical fiber emitting light input via the second incident end from a second emission end, an optical member configured to cause an axial chromatic aberration on detection light emitted via the second emission end and converge the detection light toward the measurement object, a fiber connecting section configured to detachably connect the second incident end to the first emission end, and a refractive index matching material disposed between the first emission end and the second incident end.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS[0001]The present application claims foreign priority based on Japanese Patent Application No. 2017-115555, filed Jun. 13, 2017, the contents of which is incorporated herein by reference.BACKGROUND OF THE INVENTION1. Field of the Invention[0002]The present invention relates to a confocal displacement sensor and, more particularly, to improvement of a confocal displacement sensor that measures displacement of a measurement object using a confocal optical system.2. Description of Related Art[0003]A confocal displacement sensor is an optical measurement device that measures displacement of a measurement object making use of a confocal principle of stopping down received light into reflected light from an image forming surface on which an image of a light source is formed and a phenomenon of an axial chromatic aberration in which a color drift in an optical axis direction occurs in the image of the light source.[0004]The confocal displacement senso...

AI Technical Summary

Benefits of technology

[0012]With such a configuration, since the refractive index matching material is disposed on the control housing side, it is possible to replace the head housing and the second optical fiber without replacing the refractive index matching material. Since the refractive index matching material is sheet-like, it is easy to handle the refractive index matching material.

[0013]In a third aspect of the present invention, in addition to the configuration explained above, in the confocal displacement sensor, the refractive index matching material may be configured to be a solid or gelatinous. With such a configuration, it is easy to handle the refractive index matching material.

[0014]In a fourth aspect of the present invention, in addition to the configuration explained above, in the confocal displacement sensor, a protection shutter may be provided in an insertion port of the fiber connecting section into which the second incident end is inserted. With such a configuration, it is possible to protect the end face of the first emission end in the fiber connecting section from scratches and adhesion of st...

Problems solved by technology

Therefore, measurement accuracy is deteriorated.

Therefore, ...

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