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Graphical user interface for allocating multi-function resources in semiconductor wafer fabrication and method of operation

a multi-functional resource and semiconductor wafer technology, applied in the field of resource allocation systems and process control systems, can solve the problems of failing to model and factor in the optimization effort both status and logistical data, unable to cooperatively optimize process resources, and approaches that exhibit poor response, so as to reduce load conflict, facilitate supervisory interaction, and efficiently execute

Inactive Publication Date: 2005-10-25
NAT SEMICON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

"The present invention provides a system and method for automating the process of allocating multi-function resources among a plurality of tasks in a semiconductor wafer fabrication process. The system includes a monitoring controller, a model, and a resource allocation controller. The monitoring controller monitors measurable characteristics associated with the process, while the model represents the multi-function resources and tasks and their relationships. The resource allocation controller operates the model in response to the monitoring controller and allows for real-time process automation. The system also includes a dispatch viewer that transforms real-time process system information into a multimedia format for supervisory interaction. The invention enables efficient allocation of multi-function resources among tasks, reducing load conflict and optimizing process execution."

Problems solved by technology

Such optimization efforts only account mathematically for the tasks being performed and the process resources then used to resolve the same based upon statistical characteristics only, thereby failing to model and factor into the optimization effort both status and logistical data, as well as to account for human capabilities and interaction (i.e., functions, skills, qualifications, task preferences, track records and the like) that ultimately utilize the process resources to resolve the tasks.
Conventional approaches can exhibit poor response to constantly changing or exigent circumstances, and as such fail to cooperatively optimize process resources, particularly process resources capable of performing multiple functions.
An error in batching will likely result in many wafers having to be scrapped.
The variation in the length of re-clean time windows makes the efficient management of wetdeck resources even more difficult.
In some cases, the opportunity for re-cleaning is not permitted at all.
In any event it is very costly to re-clean material when the re-clean time window requirement is exceeded.
The cost is due to the cost of chemicals, extra machine cycles, and the increased risk of processing errors and inappropriate batching.

Method used

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  • Graphical user interface for allocating multi-function resources in semiconductor wafer fabrication and method of operation

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Embodiment Construction

, it may be advantageous to set forth a definition of certain words and phrases used throughout this patent document: the terms “include” and “comprise,” as well as derivatives thereof, mean inclusion without limitation; the term “or,” is inclusive, meaning and / or; the phrases “associated with” and “associated therewith,” as well as derivatives thereof, may mean to include, be included within, interconnect with, contain, be contained within, connect to or with, coupled to or with, be communicable with, cooperate with, interleave, juxtapose, be proximate to, be bound to or with, have, have a property of, or the like; the term “memory” means any storage device, combination of storage devices, or part thereof whether centralized or distributed, whether locally or remotely; and the terms “controller,”“processor” and “allocator” mean any device, system or part thereof that controls at least one operation, such a device, system or part thereof may be implemented in hardware, firmware or s...

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Abstract

A system and method is disclosed for allocating multi-function resources among a plurality of tasks within a process system in semiconductor wafer fabrication. A resource allocator allocates multi-function resources among tasks within a process system that executes at least one application process. The resource allocator comprises a monitoring controller, model of the process system, a resource allocation controller, and a graphical user interface. The graphical user interface transforms process system information of the resource allocator into an audio-visual format to enable supervisory interaction. In one embodiment the graphical user interface provides information to reduce load conflict among multiple furnaces in semiconductor wafer fabrication.

Description

PRIORITY CLAIM TO PRIOR PATENT APPLICATIONS[0001]This patent application claims priority as a continuation in part patent application to U.S. patent application Ser. No. 10 / 299,949 filed on Nov. 19, 2002, which claims priority to U.S. Provisional Patent Application No. 60 / 408,817 filed on Sep. 6, 2002. The parent patent application is commonly owned by the assignee of the present patent application. The parent patent application is hereby incorporated by reference into the present patent application for all purposes as if fully set forth herein.CROSS REFERENCE TO RELATED APPLICATION[0002]The present invention is related to that disclosed in the following United States Non-Provisional Patent Application:[0003]U.S. patent application Ser. No. 10 / 447,324, filed concurrently herewith, entitled “SYSTEM AND METHOD FOR ALLOCATING MULTI-FUNCTION RESOURCES FOR A WETDECK PROCESS IN SEMICONDUCTOR WAFER FABRICATION.” The above patent application is commonly assigned to the assignee of the prese...

Claims

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Application Information

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Patent Type & Authority Patents(United States)
IPC IPC(8): G05B19/00G06F19/00G05B19/418
CPCG05B19/41865G06Q10/0631G06Q10/06311G05B2219/31264G05B2219/31379G05B2219/45031Y02P90/02
Inventor LOGSDON, GEORGEELMORE, GARYMANGRAM-DUPREE, LORETTA
Owner NAT SEMICON CORP
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