The invention discloses a static MEMS
loudspeaker for DSR and a manufacturing method thereof, the static MEMS
loudspeaker comprises a sound reconstruction generation
assembly and a driving
assembly, the driving
assembly is installed on one side of the sound reconstruction generation assembly, and the sound reconstruction generation assembly is in
electric signal connection with the driving assembly; the sound reconstruction generation assembly comprises a substrate, a
buried oxide layer, a first backboard, a first insulating layer, a first supporting layer, a vibrating diaphragm, a second supporting layer, a second insulating layer and a second backboard which are sequentially arranged from bottom to top. According to the invention, the composite
diaphragm structure of the double back plates, the
noise reduction ring and the buffer cone is adopted, so that the diaphragm rigidity of the
loudspeaker is remarkably reduced, the vibration freedom degree is improved, the working efficiency of the loudspeaker is optimized, and the
response time is shortened. In addition,
residual stress among the multiple
layers of films is reduced through
titanium nitride, the possibility of warping of the structure is reduced, the working performance of the device is further improved, and the service life of the device is further prolonged.