The utility model discloses a kind of
shower head height direction stepless adjustment mechanism for thin film deposition equipment, it is related to the technical field for thin film deposition equipment, the utility model aims at solving how to adjust the problem of
shower head in not opening cavity, the utility model includes vacuum cavity and
shower head, the shower head is installed in the inside top of vacuum cavity, insulating
ceramic is sleeved on the outer wall of the shower head, annular protrusion is arranged on the inner wall top of the insulating
ceramic, the outer wall top of the shower head is formed into the boss that can be clamped below annular protrusion.
Shower head height direction can be adjusted within a certain range, by adjusting, an optimal height can be determined, so that
plasma field density increases, thin film uniformity is better, improves thin film deposition efficiency and film formation cleanliness, by directly adjusting shower head height outside cavity, reduce opening cavity process, can make maintenance time shorten, improve equipment open rate, cavity particle
pollution caused by opening cavity is also reduced simultaneously.