ZnO nano crystal column/nano crystal filament composite structure product and its preparing process

Abstract

The ZnO nanometer crystal bar / nano crystal filament composite structure product in this invention belongs to a kind of oxide microstructure material made with the technology of gas phase denotation. At the beginning, the hexagonal structure ZnO nano crystal bar array is growing on the surface of substrate, with the characteristics of growing strictly in the orientation of c-axis, high density and homogeneous distribution. After that, ZnO nano crystal filament will come out on the ZnO nano crystal bar array, nearly paralleling the surface of the substrate, with high density. The characteristics of the producing process of this product is that it adopts the technology of the electron bundle reaction evaporation, and though the craft of 'two-step deposition', we can get the product by once-and-for-all growing on the surface of the substrate.

Description

technical field [0001] The invention belongs to the technical field of oxide microstructure materials and their vapor-phase epitaxy preparation, and in particular relates to a ZnO nanocrystalline column / nanocrystalline filament composite structure product with a hexagonal structure and an electron beam reaction evaporation device and a "two-step deposition" process. The preparation technology of the product obtained by one-time growth on the surface of the substrate. technical background [0002] In recent years, research on ZnO-based microstructured materials has received worldwide attention. Among many ZnO-based microstructure materials (such as nanopillars, nanowires, nanorings, nanoribbons, nanodisks, nanopropellers), nanopillars or nanowires of ZnO are characterized by their unique quasi-one-dimensional or four-needle ( Such as whiskers) space structure and its single crystal characteristics, it has a very high elastic modulus, very low thermal expansion rate, good hig...

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Problems solved by technology

If a catalyst is introduced during the preparation, for example with Au (X.Wang, Q.W.Li, Z.B.Liu, J.Zhang, Z.F.Liu, Low-temperature growth and properties of ZnO nanowires, Applied Physics Letters, 84(2004) 494l-4943 [3] ) or NiO (T.Y.Kim, J.Y.Kim, S.H.Lee, et al, Characterization of ZnO needle-shaped nanostructures grown on NiO catalyst-coated Si substrates, Synthetic Metals, 144(2004)61-68) nanoparticles as catalyst), then in The finished product of ZnO nanowires will also contain catalyst components, which reduces the quality of ZnO nanowires, especially limiting its application in special fields (such as microelectronics, optoelectronics)

[0003] The research status of the preparation of ZnO-based microstructure materials (such as nanocolumns, nanowires, nanorings, nanobelts, nanodisks, and nanopropellers) is as follows: (1) The control process of the gas phase supersaturation in the reactor is complicated. Improper, then the product that obtains is often ZnO thin film, (2) ZnO nanowire finished product is single cotton-wool shape usually macroscopically, needs to do secondary processing during practical application, (3) ZnO nanowire preparation process is due to introducing Catalyst, the finished product contains metal Zn and catalyst components, and the crystallization quality is not ideal

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