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Method for removing amine boron hydride compound from non-electroplate film solution

A compound, amine borane technology, applied in the field of removing amine borane compound, can solve serious environmental protection problems

Inactive Publication Date: 2008-09-10
EDWARDS VACUUM INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Unfortunately, although amine borane complexes are very useful reducing agents in electroless plating processes, the disposal of these materials presents serious environmental concerns

Method used

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  • Method for removing amine boron hydride compound from non-electroplate film solution
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  • Method for removing amine boron hydride compound from non-electroplate film solution

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Embodiment Construction

[0012] The present invention provides a method for separating amine borane complexes from electroless plating baths, thereby enabling the disposal of these materials in an environmentally friendly manner.

[0013] As can be seen in Figure 1, the effluent from the electroless coating process containing amine borane 10 is pumped into a column 20 containing a regenerable porous sorbent. Suitable adsorbents are polymeric resins, carbonaceous adsorbent materials such as activated carbon and carbon molecular sieves, silica gel, alumina and zeolites.

[0014] Preferred polymeric adsorbents include Ambersorb-563 from Rohm & Haas , Ambersorb-564 , Ambersorb-348-F , Ambersorb-575 , Ambersorb-572 , Ambersorb-1500 , Optipore 493L from Dow Chemical Company, Macronet MN-100, MN-200, MN-300, MN-400, MN-500, MN-600, MN-150, MN-250, MN-170 resin from Purolite International Company, and Rohm&Haas's trade name Amberlite XAD-2 、Amberlite XAD-4 、Amberlite XAD-16 The polyaromatic ...

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Abstract

A process for separation and environmentally benign disposal of amine borane complexes includes adsorbing amine borane complex onto a solid support, treating the adsorbed amine borane complex with an oxidizing agent in situ on the adsorbent thereby forming decomposition products without the formation of hydrogen gas, and collecting the decomposition products for disposal thereof.

Description

technical field [0001] The present invention relates to the removal of amine borane complexes from plating baths. The plating solution containing amine borane is adsorbed onto the carrier. The support is then treated with an oxidizing agent that oxidizes the amine borane without generating hydrogen gas. The oxidized amine boranes can be collected for environmentally friendly disposal. Background of the invention [0002] The so-called electroless plating method is to reduce the metal ions in the solution without using electricity, and then deposit the metal on the substrate. The driving force for the reduction of metal ions and their deposition comes from chemical reducing agents in solution, such as amine boranes. Amine boranes are usually prepared by the stoichiometric reaction of primary, secondary or tertiary amines with diborane. U.S. Patent Nos. 3,295,999 and 3,338,726, which are incorporated herein by reference, describe several amine borane compounds for metal pl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C18/16C02F1/28B01D15/00B01J3/00B01J20/34
CPCC23C18/1617B01D15/00B01J20/34B01J20/08B01J20/20B01J20/3416B01J20/3433B01J2220/56B01J20/103B01J20/18B01J20/3408B01J20/3475C02F1/28
Inventor 王清民J·扬巴瓦拉
Owner EDWARDS VACUUM INC