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Static pressure influence compensation method of capacitive differential pressure sensor

A differential pressure sensor, capacitive sensor technology, applied in the fluid pressure measurement, instrument, and fluid pressure measurement using capacitance change, can solve problems such as no public reports, and achieve the effect of wide application

Inactive Publication Date: 2008-10-22
SHENYANG ACAD OF INSTR SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There is no public report on the content of the static pressure effect compensation of the capacitive sensor

Method used

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  • Static pressure influence compensation method of capacitive differential pressure sensor
  • Static pressure influence compensation method of capacitive differential pressure sensor
  • Static pressure influence compensation method of capacitive differential pressure sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] Example 1: Silicon capacitance sensor, numbered 06040134, the capacitance value of the sensor was tested with an LCR capacitance meter under zero static pressure as follows: C1=82.53pF, C2=85.30pF. Then under the static pressure of 10MPa, use the LCR capacitance meter to test the increase value of the corresponding capacitance of the sensor as follows: ΔC1=0.84pF, ΔC2=1.02pF.

[0038] Connect the sensor to the conversion circuit and processing circuit to form a differential pressure transmitter. The static pressure effect of the test transmitter is -0.4% / 10MPa. The error is relatively large, use the following method to reduce the error.

[0039] Using the C1, C2, ΔC1, and ΔC2 obtained from the test, we get C 1 C 2 > ΔC 1 ΔC 2 , At this time, the influence of sta...

Embodiment 2

[0043] Example 2: Silicon capacitance sensor, numbered 06070221, after being assembled into a transmitter, the measured static pressure influence is -0.18%.

[0044] Because the static pressure influence is negative, it is necessary to connect the compensation capacitor in parallel with the C2 capacitor of the sensor. Such as figure 2 The static pressure compensation board shown is soldered according to the pad holes 1, the pad holes 2, and the pad holes 3 corresponding to the output terminals 1, output terminals 2, and output terminals 3 of the capacitance differential pressure sensor. Figure 5 The position of D4 on the static pressure compensation board shown is welded with a parallel capacitor of 5pF, and the static pressure of the test sensor is -0.065%; then a parallel capacitor of 5pF is welded on the position of D5 on the static pressure compensation board, and the total parallel capacitance value reaches 10pF. The static pressure influence of the test sensor is +0.105%. S...

Embodiment 3

[0045] Embodiment 3: Silicon capacitance sensor, numbered 06050168, the measured static pressure influence of the sensor is +0.25%.

[0046] will Figure 5 The static pressure compensation board shown is welded according to the pad holes 1, the pad holes 2, and the pad holes 3 to the output terminals 1, output terminals 2, and output terminals 3 of the capacitance differential pressure sensor. After welding, on the static pressure compensation board D1 Weld a parallel capacitance of 5pF at the position, and the static pressure influence of the test sensor is +0.125%; then weld a parallel capacitance of 5pF at the position D2 on the static pressure compensation board, then the total compensation capacitance value reaches 10pF, and the static pressure influence of the test sensor is +0.03 %. It can be judged that the ideal value of the static pressure compensation capacitor Cb can be 10pF.

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Abstract

The invention relates to capacitance differential pressure transducer static pressure influence compensating process. It connects the transducer with switching circuit and processing circuit to form differential pressure transmitter. Its features are as follows: while testing transmitter static pressure influence error vale, compensating a fixed capacity value and increasing equivalent capacitance value to compensate extra static pressure influence; confirming compensating capacitance Cb value according to formula Cb=C2*delta C1 / delta C2-C1 and Cb=C1*delta C2 / delta C1-C2; when the static pressure influence is negative value, parallel connecting capacitance Cb with transducer C2; when it is positive value, parallel connecting with the transducer C1; selecting standard capacitance to ensure deviation is less than 0.1 PF for computing Cb. The method has the advantages of simple operation, low cost, greatly increasing capacitive transducer quality price ratio, and good for its volume production.

Description

Technical field [0001] The invention relates to sensor manufacturing and its signal processing technology, and a method for compensating static pressure influence of a capacitive differential pressure sensor. Background technique [0002] The capacitive differential pressure sensor is a new type of differential pressure sensor. Its core detection component converts the two different pressure signals applied into each corresponding capacitance change. The rear detection circuit converts the capacitance change into an electrical signal. The signal is processed and detected to obtain the differential pressure value of the applied pressure. [0003] For a differential pressure sensor, under ideal conditions, its output is sensitive to the applied pressure difference, the change is unique, and it is not sensitive to the pressure value, that is, the static pressure effect of the differential pressure sensor should be small. However, in the actual situation, there are various factors th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L13/06G01L19/00G01L1/14G01L9/12
Inventor 张治国匡石陈信奇李颖刘沁
Owner SHENYANG ACAD OF INSTR SCI