Optical angle gauge test calibrator utilizing mutual orthogonal double-frequency laser interferometer
A dual-frequency laser interferometry and calibrating instrument technology, which is applied in the direction of using optical devices, instruments, and measuring devices, can solve the problems of large interpretation errors and great influence on the accuracy of measuring the deflection angle of optical angle gauges, so as to improve accuracy and reduce impact Effect
Inactive Publication Date: 2009-03-18
BEIJING INSTITUTE OF TECHNOLOGYGY
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The disadvantage is that the interference fringes need to be interpreted in this instrument, and the accurate interpretation of the interference fringes is realized by using the zero-crossing point of the analog signal of light intensity. Due to the influence of the contrast of the interference fringes, the interpretation error is relatively large. The accuracy of the deflection angle has a great influence
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[0019] like figure 1 As shown, the present invention utilizes the optical angle gauge test calibration instrument of mutually orthogonal dual-frequency laser interferometer to comprise two mutually perpendicular optical paths, wherein one optical path is dual-frequency laser interferometer A3, dual-frequency laser interferometer A3 spectroscope 2 , dual-frequency laser interferometer A static mirror 4, dual-frequency laser interferometer A moving mirror 7 and precision translation stage 8 are used to measure the actual distance that the optical angle gauge moves in a plane parallel to its main section. Another optical route consists of a dual-frequency laser interferometer 13, a long baseline beam splitter 11, an optical path compensation parallel glass plate 5, a long baseline mirror 6 and a precision angular displacement stage 10, which is used to measure the thickness change of the optical angle gauge during the movement process The amount of optical path change introduced....
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The invention discloses a high accuracy use mutual orthogonal two double frequencies laser interferometer optics angle gauge testing marking apparatus, which includes controlled computer 1, double frequency laser interferometer A3 and rays direction 2,the static reflector 4 and the motion reflector 7 of placed in turn according to light path direction, double frequency laser interferometer B13 which mutually vertical laying aside with double frequency laser interferometer A3 rays path, the long baseline spectroscope 11, the long baseline reflector 6, the optical path compensate parallel glass plate 5 and the measured photometry angle gauge 9 which in turn placed according to the double frequency laser interferometer B13 light path, and also includes migration precise translation 8, small rotation precise angular displacement 10 and step motor control box 12 of making the measured optic angle gauge 9 along the main section direction move. The invention has the following remarkable merit: through the invention installment survey optics angle gauge angle of deviation in 2'-10'survey scope, the measuring accuracy may achieve 0.02', enormously increased optics angle gauge angle of deviation angular accuracy. Uses the mutual orthogonal double frequency laser interferometer take a bearing, reduced the optical material refractive index and the interference fringe interprets and so on other factors influence to take a bearing precision.
Description
technical field [0001] The invention belongs to the field of small-angle measurement and measurement, and relates to a method and a device for realizing high-precision measurement and calibration of the deflection angle generated by monochromatic light passing through an optical angle gauge. The calibrated optical angle gauge can be used as a standard small-angle generator or a small-angle reference to complete the test and calibration of the indication error of the autocollimator micrometer, theodolite subdivision reading system, and goniometric instruments. Background technique [0002] Small-angle metrology is an important part of metrology science. With the upgrading and industrialization of photoelectric digital image testing instruments, the demand for small-angle measurement is increasing, and the requirements for its accuracy are also getting higher and higher. In the aerospace measurement and control system, a high-precision small-angle generator is required to pro...
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IPC IPC(8): G01B9/02
Inventor 何川林家明沙定国任建荣邹桂兰张旭升陈凌峰周桃庚
Owner BEIJING INSTITUTE OF TECHNOLOGYGY