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Light spot energy barycenter rectification module and its measurement method and device

A measurement method and measurement device technology, applied in the field of light spot energy center of gravity correction module, can solve the problems of unusable focusing and leveling measurement system, and achieve the effects of low cost, improved accuracy and linearity, and simple operation

Active Publication Date: 2009-05-27
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In other words, if the focusing and leveling measurement system is sensitive to these patterns and grooves, then the focusing and leveling measurement system cannot be used in a lithography machine with a relatively high resolution and a relatively small depth of focus.

Method used

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  • Light spot energy barycenter rectification module and its measurement method and device
  • Light spot energy barycenter rectification module and its measurement method and device
  • Light spot energy barycenter rectification module and its measurement method and device

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Embodiment Construction

[0038] The light spot energy center of gravity correction module and its usage method of the present invention will be further described in detail with reference to the accompanying drawings.

[0039] image 3 It is a structural diagram of a focusing, leveling and measuring device according to a preferred embodiment of the present invention. The detection beam projected onto the silicon wafer 5 of the measured object is reflected by the silicon wafer and carries the position and shape information of the silicon wafer 5. Since the silicon wafer 5 has areas with different reflectivities, the local reflectance in the detection spot is uneven. , that is, there is a region with different reflectivity inside the spot at position L1, the change of the local reflectivity inside the spot also causes the position change of the center of gravity of the spot energy relative to the spot itself, and this change of the center of gravity of the spot energy also leads to the whole measurement ...

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Abstract

The invention discloses a facula energy barycenter correction module and an energy measuring method and device of using the facula energy barycenter correction module. And the module comprises beam splitter and split beam image inverter. And the module can eliminate the measure errors caused by position variation of inner energy barycenter of detection facula generated by inequal local reflectivity of the tested object from some position measuring systems, thus improving accuracy, repeatability, and adaptability to tested objects and linearity of the position measuring system.

Description

technical field [0001] The invention relates to a light spot energy center of gravity correction module and a measurement method and device using the light spot energy center of gravity correction module, especially for eliminating the measurement caused by the unevenness or change of the local reflectivity of the measured object in some position measurement systems. A light spot energy center of gravity correction module for errors, a focusing and leveling measurement method and a device thereof. Background technique [0002] Lithography machine is one of the important equipment for the production of large-scale integrated circuits, such as figure 1 As shown, its function is to transfer the pattern on the mask plate 1 to the silicon wafer 5 (including the substrate, coating and photoresist; generally refers to all exposed objects) in a certain proportion through the optical imaging system 2 . Among them, 3a and 3b are focusing and leveling measurement systems, which are ma...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
Inventor 关俊
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD